Abstract: An electrostatic atomizer includes a discharge electrode, an opposite electrode positioned in front of the discharge electrode in a spaced-apart relationship therewith, a housing for defining an atomization chamber between the discharge electrode and the opposite electrode, a water supply unit for supplying water for atomization to the discharge electrode, and a voltage application unit for applying a voltage to the discharge electrode. The housing is provided with an air vent window through which the atomization chamber is opened laterally outwards. The opposite electrode is provided with a soundproof shield portion extended therefrom to cover, when seen from a front side of the opposite electrode, the space existing laterally outwards of the air vent window of the housing. The soundproof shield portion reflects rearwards a discharge sound generated in the atomization chamber.

Abstract: The electrostatic atomizing device includes a discharge electrode, an opposed electrode, and a voltage application device. The voltage application device is configured to apply a voltage between the discharge electrode and the opposed electrode so as to atomizing a liquid supplied to the discharge electrode. The electrostatic atomizing device further includes a reduced water provision device configured to supply reduced water as the above liquid to the discharge electrode.

Abstract: An oxidation and reduction fine particles generator includes an atomization electrode, a water feeder for supplying water to the atomization electrode and a high voltage generator, and also includes a switch device and a controller. The switch device changes an operation mode to an oxidation mode or a reduction mode. The controller generates negatively charged fine water particles including radicals through electrostatic atomization by applying a high voltage to water supplied to the atomization electrode in the oxidation mode. The controller also inactivates and activates the water feeder and the high voltage generator, respectively to generate reduction fine particles from the atomization electrode by dry discharge in the reduction mode.

Abstract: The washing machine of this invention comprises a housing with a washing tub, a rotating mechanism, a perforated basket, and an electrostatically atomizing device. The perforated basket is rotatably mounted in the washing tub with leaving a space between the perforated basket and the washing tub. The electrostatically atomizing device is configured to generate the mist of the charged minute water particles. The washing machine is configured to lead the mist of the charged minute water particles to the space, so that the space is filled with the mist of the charged minute water particles. Consequently, molds on an inside of the washing tub and an outside of the perforated basket is eliminated by the electrostatically atomizing device.

Abstract: A loader arrangement 7 of a shot-blasting machine includes a bucket loader 29 having a tip opening that can be opened and closed by means of a lid 35. The loader arrangement 7 also includes a swivel arm 32, which is vertically and pivotally attached to a frame 4 via a linkage 31, for vertically swiveling the bucket loader 29, and a chain block 34 for swiveling the arm 32. Once the bucket loader 29 has reached the upper position above a rotary drum 5 by means of the swivel arm 32, a guide means 30, which is attached to the arm 32, allows the bucket loader 29 to approach the drum 5 through its top opening by driving a hydraulic cylinder 33, while the tip of the bucket loader 29 is opposed to the bottom wall of the drum 5. Once the tip of the bucket loader 29 is close to the bottom wall or the inner peripheral wall of the drum 5, the lid 35 is opened to drop the work pieces in the bucket loader 29 into the drum 5.

Abstract: Metal corrosion and substrate contamination can be suppressed, and process quality and yield can be improved. A substrate processing apparatus comprises: a process chamber; a substrate holder; a cover part closing and opening the process chamber; a substrate holder stage; a rotary mechanism rotating the substrate holder stage; a rotation shaft inserted through the cover part and connected to the substrate holder stage and the rotary mechanism so that a first gas ejection port is formed therebetween; a first gas stagnant part surrounded by the rotary mechanism, the cover part, and the rotation shaft; a second gas ejection port formed at the substrate holder stage; a second gas stagnant part formed at the rotation shaft and communicating with the process chamber via the second gas ejection port; and a flow port formed at the rotation shaft for connecting the first and second gas stagnant parts.

Abstract: When a quartz part is placed on a floor, the inside of a furnace is not polluted by contaminants attached from the floor to a seal surface of the quartz part and entering the inside of the furnace. A substrate processing apparatus includes a reaction tube, a first joining surface, a second joining surface, and a third joining surface. The reaction tube includes a quartz inner tube and a quartz outer tube. The first joining surface is configured to air-tightly join the outer tube and a quartz manifold. The second joining surface is configured to air-tightly join the manifold and a quartz seal cover. The third joining surface is configured to air-tightly join the seal cover and a seal cap. An O-ring is installed at least one of the first, second, and third joining surfaces, and a protrusion is installed outside the O-ring installed at the jointing surface.

Abstract: A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than the outer tube and configured to process a substrate therein; a heating device installed at a more outer side than the outer tube and configured to heat the inside of the outer tube; a lid configured to open and close an opening of the manifold, with a seal member intervened therebetween; and a heat absorption member installed in the manifold, with a bottom end of the inner tube intervened therebetween, and configured to absorb heat from the heating device, the heat absorption member being made of a non-metal material.

Abstract: Disclosed is an electrostatic atomizer, which comprises a cooler adapted to cool an atomizing electrode so as to allow moisture in air to be frozen onto the atomizing electrode, a melter adapted to melt ice frozen on the atomizing electrode so as to supply water onto the atomizing electrode, a high-voltage applying section adapted to apply a high voltage to the atomizing electrode, and a control section adapted to activate the high-voltage applying section in a state after supplying water onto the atomizing electrode by melting the ice frozen thereon, so as to apply a high voltage to the atomizing electrode to electrostatically atomize the water supplied on the atomizing electrode.

Abstract: A substrate processing apparatus comprises: a process chamber configured to accommodate a substrate; a gas supply line configured to supply gas into the process chamber; and an exhaust line configured to exhaust the inside of the process chamber. In the substrate processing apparatus, the gas supply line comprises: a preheating unit configured to preheat the gas before supplying the gas into the process chamber; a metal pipeline configured to supply the preheated gas into the process chamber; and a heat dissipation member covering the outer periphery of a bend section formed in the metal pipeline.

Abstract: Disclosed is an electrostatic atomizer, which comprises a high-voltage applying section adapted to apply a high voltage between an atomizing electrode and a counter electrode so as to electrostatically atomize water supplied onto the atomizing electrode, wherein the high-voltage applying section is operable to set an absolute value of a voltage to be applied to the atomizing electrode smaller than an absolute value of a voltage to be applied to the counter electrode. This allows a physical object, such as an article stored in a mist-receiving space or an inner wall of a structural member defining the mist-receiving space to become less likely to be electrostatically charged, and makes it possible to avoid causing a problem about discomfort due to discharge of static charges when a user touches the physical object.

Abstract: An electrostatically atomizing unit for use in a temperature regulating appliance to add a function of generating a mist of charged minute water particles for deodorization and/or sterilization of a temperature-regulated space. The appliance has a cold space of which air is cooled by cooling means and is fed to cool the temperature-regulated space divided from the cold space by a partition. The atomizing unit has an emitter electrode which is configured to condense water from within a surrounding air. A high voltage source applies a high voltage to the emitter electrode to atomize the condensed water into the charged minute water particles which are discharged from the emitter electrode into the temperature-regulated space. The emitter electrode is provided with a cooling coupler which establishes a heat transfer relation through the partition to the cold space to cool the emitter electrode by making the use of the cooling means inherent to the appliance.

Abstract: Water is fed from a tank to a capillary carrier having an emitter end from which an ionized water particle is emitted by a voltage being applied across the emitter end and an opposed electrode. A cation exchanger is provided to remove minerals such as Ca2+ and Mg2+ from the water being fed through the capillary carrier or from the water to be fed to the carrier from the tank, thereby avoiding the ions from precipitating at the emitter end as CaCO3 or MgO in reaction with CO2 in the surrounding air, and therefore assure reliable electrostatic atomization over a long period of time.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus comprises a reaction tube; a heating device configured to heat the reaction tube; and a manifold installed outward as compared with the heating device and made of a nonmetallic material. A first thickness of the manifold defined in a direction perpendicular to a center axis of the reaction tube is greater than a second thickness of the manifold defined at a position adjacent to the reaction tube in a direction parallel to the center axis of the reaction tube. The manifold comprises a protrusion part of which at least a portion protrudes inward more than an inner wall of the reaction tube, and a gas supply unit disposed at at least the protrusion part for supplying gas to an inside of the reaction tube.

Abstract: An electrostatic atomizing device for ejecting a mist of charged minute particles includes metal ion elution means for eluting sterilizing metal ions into a liquid to be electrostatically atomized. The metal ions are taken up by the charged minute particles, and are ejected into an environment space together with the charged minute particles, thereby eliciting a sterilizing effect. The elution amount of the metal ions is regulated by varying the voltage applied between two kinds of metal bodies.

Abstract: An electrostatically atomizing device includes an emitter electrode, an opposed electrode disposed in an opposed relation to the emitter electrode, liquid supply means for supplying a liquid to the emitter electrode, and high voltage generating means for applying a high voltage across the emitter electrode and the opposed electrode. The liquid supplied onto the emitter electrode is electrostatically charged through application of the high voltage, as a result of which charged minute liquid particles are discharged from a discharge end of the emitter electrode. The device includes detecting means for detecting a discharge condition developed between the emitter electrode and the opposed electrode, and a controller for controlling the high voltage generating means to regulate its voltage output so as to maintain a predetermined discharge condition, based on detection results by the detecting means.

Abstract: The liquid is supplied to an emitter electrode which is provided at a tip of a liquid carrier, receives a high voltage, is electrical-charged, and discharged as a mist of charged minute water particles of nanometer order from the emitter electrode. The emitter electrode discharges the mist of the charged minute water particles of micron order at the same time by a pressure which is applied to the liquid which is supplied to the tip of the emitter electrode. An electrostatically atomizing device supplies liquid to an emitter electrode of a tip of a liquid carrier, applies the high voltage to the liquid, electrically-charges the liquid, and causes the emitter electrode to discharge a mist of charged minute water particles of nanometer order. In addition, the electrostatically atomizing device applies a pressure to the emitter electrode and causes the emitter electrode to discharge a mist of the charged minute water particles of micron order.

Abstract: The liquid supplied to an emitter electrode located at a tip of an atomization nozzle receives the high-voltage and electrically charged. The mist of the charged minute water particles of nanometer sizes is generated from the emitter electrode. A pressure regulating means regulates a pressure applied to the liquid on the tip of the emitter electrode. Therefore, the mode of generating the mist of the charged minute water particles of nanometer sizes or the mode of generating the mist of the charged minute water particles of nanometer and micron size is selected.

Abstract: A liquid stored in the liquid storing means within a housing is supplied to a carrier. A high voltage applied to a discharge end of the carrier and an opposed electrode to emit tiny ionized liquid particles. At leas part of the liquid storing means is detachable to the housing for easy replenishment of the liquid.

Abstract: A loader arrangement 7 of a shot-blasting machine includes a bucket loader 29 having a tip opening that can be opened and closed by means of a lid 35. The loader arrangement 7 also includes a swivel arm 32, which is vertically and pivotally attached to a frame 4 via a linkage 31, for vertically swiveling the bucket loader 29, and a chain block 34 for swiveling the arm 32. Once the bucket loader 29 has reached the upper position above a rotary drum 5 by means of the swivel arm 32, a guide means 30, which is attached to the arm 32, allows the bucket loader 29 to approach the drum 5 through its top opening by driving a hydraulic cylinder 33, while the tip of the bucket loader 29 is opposed to the bottom wall of the drum 5. Once the tip of the bucket loader 29 is close to the bottom wall or the inner peripheral wall of the drum 5, the lid 35 is opened to drop the work pieces in the bucket loader 29 into the drum 5.