Abstract: A rotary fluid machinery includes a fixed member, a drive shaft driven and rotated about a rotation axis, a movable member, a movable member support part and a reverse moment generating mechanism. The movable member is rotatably mounted at the drive shaft with its center being eccentrically disposed relative to the rotation axis, with the movable member and the fixed member forming a fluid chamber. Revolution of the movable member changes the volume of the fluid chamber. The movable member is configured to swing in association with its revolution. The reverse moment generating mechanism generates a moment in a reverse direction about the rotation axis relative to a moment about the rotation axis caused by the revolving movement of the movable member.

Abstract: A fluid machinery includes a rotary mechanism, an annular back pressure chamber and an oil passage. The rotary mechanism includes first and second cooperating members, each including an engaging member extending from an end plate, with the cooperating members being arranged to oscillate relative to each in order to change volumes of operation chambers formed between the cooperating members. The annular back pressure chamber is formed on the back surface side of the end plate of the first cooperating member, and communicates with an intermediate operation chamber of the operation chambers to thrust the first cooperating member against the second cooperating member. The intermediate operation chamber is in an intermediate pressure state. The oil passage is arranged to communicate an oil into the back pressure chamber to fill the back pressure chamber with the oil. The rotary mechanism can include a piston and cylinder, or can include a fixed and orbiting scroll.

Abstract: A bolt hole receiving a fixing bolt is formed in a portion of an end plate overlapping an annular piston or a fixed wrap as viewed in a thickness direction of the end plate to open at the back face of the end plate. In fixing a discharge valve to the end plate, the fixing bolt is screwed into the bolt hole.

Abstract: A fluid machinery includes a rotary mechanism, an annular back pressure chamber and an oil passage. The rotary mechanism includes first and second cooperating members, each including an engaging member extending from an end plate, with the cooperating members being arranged to oscillate relative to each in order to change volumes of operation chambers formed between the cooperating members. The annular back pressure chamber is formed on the back surface side of the end plate of the first cooperating member, and communicates with an intermediate operation chamber of the operation chambers to thrust the first cooperating member against the second cooperating member. The intermediate operation chamber is in an intermediate pressure state. The oil passage is arranged to communicate an oil into the back pressure chamber to fill the back pressure chamber with the oil. The rotary mechanism can include a piston and cylinder, or can include a fixed and orbiting scroll.

Abstract: In a compression mechanism of a rotary compressor, a cylinder chamber is defined by a cylinder and a second housing. A back surface side gap is defined between an end plate part of the cylinder and a flat plate part of a first housing. The first housing is provided with a communicating path and a differential pressure regulating valve. When the difference between the suction pressure and the discharge pressure is small, the discharge pressure is introduced through the communicating path to an intermediate gap whereby both an internal gap and the intermediate gap are placed at the same pressure as the discharge pressure. Conversely, when the difference between the discharge pressure and the suction pressure is great, the communicating path is made discontinuous by the differential pressure regulating valve whereby the intermediate gap is placed at an intermediate pressure lower than the discharge pressure.

Abstract: A valve guard for restricting the amount of deformation of a valve disc has a main body part abuttable with the back surface of the valve disc, and a fixation part extending to outside of a receding part. Upon mounting the valve guard to an end plate part, the fixation part is firmly attached to the outside of the receding part of the end plate part.

Abstract: A bolt hole receiving a fixing bolt is formed in a portion of an end plate overlapping an annular piston or a fixed wrap as viewed in a thickness direction of the end plate to open at the back face of the end plate. In fixing a discharge valve to the end plate, the fixing bolt is screwed into the bolt hole.

Abstract: A blade moves backward/forward to enter four different states, namely a first state in which the tip thereof is in sliding contact with the internal peripheral surface of an external side cylinder part, a second state in which the tip is positioned in the cutaway portion of a ring-shaped piston to thereby place only an external side cylinder chamber at rest, a third state in which the tip is positioned in the cutaway portion of an internal side cylinder part to thereby place only the external side cylinder chamber and an intermediate cylinder chamber at rest, and a whole rest state in which the tip is positioned in a blade groove to thereby place all of the cylinder chambers at rest.

Abstract: A rotary fluid machinery includes a fixed member, a drive shaft driven and rotated about a rotation axis, a movable member, a movable member support part and a reverse moment generating mechanism. The movable member is rotatably mounted at the drive shaft with its center being eccentrically disposed relative to the rotation axis, with the movable member and the fixed member forming a fluid chamber. Revolution of the movable member changes the volume of the fluid chamber. The movable member is configured to swing in association with its revolution. The reverse moment generating mechanism generates a moment in a reverse direction about the rotation axis relative to a moment about the rotation axis caused by the revolving movement of the movable member.

Abstract: A bolt hole receiving a fixing bolt is formed in a portion of an end plate overlapping an annular piston or a fixed wrap as viewed in a thickness direction of the end plate to open at the back face of the end plate. In fixing a discharge valve to the end plate, the fixing bolt is screwed into the bolt hole.

Abstract: A valve guard for restricting the amount of deformation of a valve disc has a main body part abuttable with the back surface of the valve disc, and a fixation part extending to outside of a receding part. Upon mounting the valve guard to an end plate part, the fixation part is firmly attached to the outside of the receding part of the end plate part.

Abstract: In a compression mechanism of a rotary compressor, a cylinder chamber is defined by a cylinder and a second housing. A back surface side gap is defined between an end plate part of the cylinder and a flat plate part of a first housing. The first housing is provided with a communicating path and a differential pressure regulating valve. When the difference between the suction pressure and the discharge pressure is small, the discharge pressure is introduced through the communicating path to an intermediate gap whereby both an internal gap and the intermediate gap are placed at the same pressure as the discharge pressure. Conversely, when the difference between the discharge pressure and the suction pressure is great, the communicating path is made discontinuous by the differential pressure regulating valve whereby the intermediate gap is placed at an intermediate pressure lower than the discharge pressure.

Abstract: A bolt hole receiving a fixing bolt is formed in a portion of an end plate overlapping an annular piston or a fixed wrap as viewed in a thickness direction of the end plate to open at the back face of the end plate. In fixing a discharge valve o the end plate, the fixing bolt is screwed into the bolt hole.

Abstract: A blade moves backward/forward to enter four different states, namely a first state in which the tip thereof is in sliding contact with the internal peripheral surface of an external side cylinder part, a second state in which the tip is positioned in the cutaway portion of a ring-shaped piston to thereby place only an external side cylinder chamber at rest, a third state in which the tip is positioned in the cutaway portion of an internal side cylinder part to thereby place only the external side cylinder chamber and an intermediate cylinder chamber at rest, and a whole rest state in which the tip is positioned in a blade groove to thereby place all of the cylinder chambers at rest.

Abstract: The substrate drying apparatus has a substrate processing vessel 1, a substrate supporting section for supporting plural substrates 2 in a standing condition and lined up condition in the interior of the substrate processing vessel 1, fluid reservoir section 3 for drying provided at an upward predetermined position of the substrate processing vessel 1, a first inert gas supplying section 4 for blowing inert gas against the drying fluid 6 pooled in the fluid reservoir section 3 for drying so as to generate droplet of the drying fluid, and for guiding the droplet towards the center of the substrate processing vessel 1, and a second inert gas supplying section 5 for supplying inert gas vertically and downwardly so as to supply the generated droplet of the drying fluid towards the substrates 2, consequently safety is improved without providing special safety device, and sufficient amount of drying fluid is supplied to the dipping boundary face of the substrate and the cleaning liquid.

Abstract: The substrate drying apparatus has a substrate processing vessel 1, a substrate supporting section for supporting plural substrates 2 in a standing condition and lined up condition in the interior of the substrate processing vessel 1, fluid reservoir section 3 for drying provided at an upward predetermined position of the substrate processing vessel 1, a first inert gas supplying section 4 for blowing inert gas against the drying fluid 6 pooled in the fluid reservoir section 3 for drying so as to generate droplet of the drying fluid, and for guiding the droplet towards the center of the substrate processing vessel 1, and a second inert gas supplying section 5 for supplying inert gas vertically and downwardly so as to supply the generated droplet of the drying fluid towards the substrates 2, consequently safety is improved without providing special safety device, and sufficient amount of drying fluid is supplied to the dipping boundary face of the substrate and the cleaning liquid.

Abstract: Insertion holes (3c, 4e) into which a connection pipe (9) are inserted are formed from a casing (3) to a cylinder (4). The connection pipe (9) has a flange (9a) formed on the outer periphery at a set distance from the end of the connection pipe (9). With the flange (9a) in contact with the wall outer surface of the casing (3), the end part of the connection pipe (9) is inserted into the insertion holes (3c, 4e). Between the flange (9a) and the wall outer surface of the casing (3), an O-ring (01) is fit so as to surround an internal passage (9f) of the connection pipe (9). Another O-ring (02) is fit between the end part of the connection pipe (9) and the insertion hole (4e) of the cylinder (4).