Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract: For the purpose of solving problems inherent to a white Al2O3 spray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored Al2O3 spray coating of a luminosity lower than grayish white, achromatic or chromatic color.

Abstract: In order to propose a dry process technique of producing a printing roll having safe and beauty concave portions for printing image area without discharging environmental contaminating substance and a new technique for improving quality of printed matters, this invention is to provide a printing roll with DLC film layer in which laser beam-engraved grooves as concave portions for printing image area are formed on a carbide cermet spray coating formed on a surface of a roll substrate, and a method wherein a carbide cermet spray coating is formed on a surface of a roll substrate roughened by a blast treatment, the surface of the carbide cermet spray coating is ground or ground-polished, then a DLC film is formed on the ground or ground-polished surface and thereafter laser beam-engraved grooves are formed on the surface of the DLC film as a concave portion for printing image area.

Abstract: For the purpose of solving problems inherent to a white Al2O3 spray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored Al2O3 spray coating of a luminosity lower than grayish white, achromatic or chromatic color.

Abstract: A member is obtained by forming a Y2O3 black spray coating on a surface of a substrate or covering the surface of the substrate with a Y2O3 black spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The Y2O3 black spray coating is produced by subjecting white Y2O3 powdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a Y2O3 white spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

Abstract: A coating material for a thermal barrier coating having excellent corrosion resistance and heat resistance comprises a substrate, an undercoat made of an aluminum-containing heat-resistant alloy, Cr2O3 layer as a middle layer on the undercoat, and a top coat made of ZrO2 based ceramic on the middle coat.

Abstract: A member is obtained by forming a Y2O3 black spray coating on a surface of a substrate or covering the surface of the substrate with a Y2O3 black spray coating through an undercoat or a middle layer. This coating has good heat characteristics and is good in the resistance to damaging through a high hardness. The Y2O3 black spray coating is produced by subjecting white Y2O3 powdery material to a plasma spraying in an inert gas atmosphere containing substantially no oxygen or by forming a Y2O3 white spray coating and then irradiating an electron beam or a laser beam to this coating to melt at least a part of the white coating under heating to thereby smoothen denseness and blacken the surface of the coating.

Abstract: A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.

Abstract: A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.

Abstract: In order to advantageously solve problems such as lowering of the productivity, contamination of alloy coating due to the adoption of different metal, increase of the cost due to the adoption of different coating process, a coating of MCrAlX alloy containing an oxide such as CoO, NiO or the like is directly formed at a thickness of 10˜500 &mgr;m through a low pressure plasma spraying process containing substantially no oxide and thereafter the same MCrAlX alloy xontaining no oxide is applied thereonto at a thickness of 100˜800 &mgr;m through a low pressure plasma spraying process in a non-oxidizing atmosphere to form a composite sprayed coating.

Abstract: In order to advantageously solve problems such as lowering of the productivity, contamination of alloy coating due to the adoption of different metal, increase of the cost due to the adoption of different coating process, a coating of MCrAlX alloy is directly formed on a substrate surface of a member exposed to a high temperature at a thickness of 10.about.300 .mu.m through atmospheric plasma spraying process in air or flame spraying process (including low-velocity flame spraying process, high-velocity flame spraying process) and thereafter the same MCrAlX alloy is applied thereonto at a thickness of 100.about.800 .mu.m through low pressure plasma spraying process in a non-oxidizing atmosphere.