Abstract: A production line constructing system for constructing a production line having groups of processing apparatuses, articulated robots for loading workpieces on and unloading processed workpieces from the processing apparatuses, and an automatic conveyor in the form of a vehicle for carrying a respective articulated robot and for conveying the workpieces between the processing apparatuses. The dimensions of the articulated robot are determined taking into consideration the width of passages in a work area, the dimensions of the vehicle, restrictions on available power supply, and the conveying speed of the vehicle carrying the articulated robot relative to the conveying speed of the operator. The production line is constructed so that a maximum loading/unloading area on the processing apparatuses within which a workpiece is loaded on and unloaded from the processing apparatus is included in a range of movement of the end effector of the articulated robot which is limited in dimensions.

Abstract: An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.

Abstract: An equipment is diagnosed by monitoring a career of operations of the equipment necessary for diagnosing the equipment and a condition of the equipment during the operation, monitoring information on equipment operations and information on variations in operation of the equipment having started operation for a data gathering purpose, selecting some of the gathered data, classifying the selected data based on rules, computing characteristics of variations in equipment state during the operation of the equipment and diagnosing the data on the basis of criterion references for the characteristics prescribed by the rules as an equipment diagnostic procedure.

Abstract: The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.

Abstract: The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.