Abstract: A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.

Abstract: A chemical liquid supplying apparatus capable of discharging chemical liquid with high accuracy and monitoring a leakage of an incompressible medium from a region between a piston and a cylinder is provided. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating within a cylinder hole of the cylinder. A first bellows cover for forming a first seal chamber is provided between a large-diameter piston portion and the cylinder, and a second bellows cover for forming a second seal chamber is provided between a small-diameter piston portion and the cylinder. To detect pressure of the incompressible medium enclosed in the seal chambers, a seal-chamber pressure sensor is attached to the cylinder, and a deterioration degree of seal members is determined by detecting the pressure.

Abstract: A chemical liquid supplying apparatus can discharge chemical liquid with high accuracy and monitor a leakage of an incompressible medium from a region between a piston and a cylinder. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating in a cylinder hole of the cylinder. A bellows cover is provided between the piston and the cylinder, and forms a seal chamber continuous to a sliding face of the piston. A seal-chamber pressure sensor is attached to the cylinder so as to detect the pressure of the incompressible medium for sealing enclosed in the seal chamber, and a deterioration degree of a seal member is determined by detecting the pressure in the seal chamber.

Abstract: A valve element for opening and closing a flow path can be reliably set to an opening position and a closing position. The valve element for opening and closing a communication opening portion communicating with an inflow hole and an outflow hole is provided in a valve receiving chamber formed in a valve block, and a valve magnet is provided in the valve element. A driving magnet can be moved to approach to and separate from the valve element by a pneumatic cylinder. When the driving magnet approaches to the valve element, the valve element moves to a closing position where the communication opening portion is closed. When the driving magnet separates from the valve element, the valve magnet provided in the valve element is attracted to a magnetic member, so that the valve element is kept at an opening position where the communication opening portion is opened.

Abstract: A chemical liquid supply device capable of preventing chemical liquid from being discarded and applying the clean liquid is provided. This device is used to apply the liquid from a nozzle to a processed object. The nozzle is provided in a moving head and reciprocates between an applying position and a waiting position. A chemical liquid supply unit includes a chemical-liquid tank and a pump for discharging the liquid in the tank, whereby the discharged liquid is filtered by a filter and supplied to the nozzle through a supply tube. The moving head is provided with an application valve operating so as to take an applying state of applying the liquid from the nozzle and a stopped state of stopping the application, and a valve chamber of the application valve is connected to a buffer tank through a circulation tube. The circulation tube is provided with a circulation valve for opening/closing its flow path.

Abstract: As shown in FIG. 3, a primary-side valve 13 and a secondary-side valve 14 are assembled in a nozzle assembly 12 on which a nozzle 11 for dispensing a chemical liquid is formed. The primary-side valve 13 is a valve for opening/closing a secondary-side flow path 14b communicating with the nozzle 11, whilst the secondary-side valve 14 is a valve for opening/closing an primary-side flow path 13b communicating with a connection port 18 that is open to the outside. A pump is provided between the primary-side valve 13 and the secondary-side valve 14. A double tube 21, having an internal tube 19 in which the chemical liquid flows and an external tube 20 in which temperature control water flows, is connected to the connection port 18. The chemical liquid kept at fixed temperature is sucked into a pump room 52 and is then dispensed from the nozzle 11.

Abstract: A flexible tube 20 has an inlet side fixed end 21, and an outlet side fixed end 22, and an elastic deformation portion 23 is provided between them. The elastic deformation portion 23 is provided with convex arc portions 42. In the convex arc portions 42, three apices 41 provided apart at approximately regular intervals in the circumferential direction are each curved in a convex shape outward so as to have smaller curvature radius than that of a virtual circle S tangent to the apices 41 from each apex as a center for deformation. Concave arc portions 43 are formed consecutively between the respective convex arc portions 42 in circumferential direction, and the concave arc portions 43 are each curved in a concave shape outward. At a time of expansion and shrinkage of the elastic deformation portion, the respective convex arc portions 42 elastically deform in the circumferential direction, and the concave arc portions 43 elastically deform in the radial direction.

Abstract: A valve element for opening and closing a flow path can be reliably set to an opening position and a closing position. The valve element for opening and closing a communication opening portion communicating with an inflow hole and an outflow hole is provided in a valve receiving chamber formed in a valve block, and a valve magnet is provided in the valve element. A driving magnet can be moved to approach to and separate from the valve element by a pneumatic cylinder. When the driving magnet approaches to the valve element, the valve element moves to a closing position where the communication opening portion is closed. When the driving magnet separates from the valve element, the valve magnet provided in the valve element is attracted to a magnetic member, so that the valve element is kept at an opening position where the communication opening portion is opened.

Abstract: A flexible tank has a volume-variable chamber formed so as to be sectioned by a flexible tube that is expanded or contracted in accordance with the amount of the contained chemical liquid, and adaptor parts attached to the flexible tube. A primary-side port open to the volume-variable chamber is open into one of the adaptor parts, and a secondary-side port open to the volume-variable chamber is open into the other adaptor part. The contact between the chemical liquid and air in the volume-variable chamber is suppressed to minimum level, thereby containing the chemical liquid without deteriorating the cleanliness of the chemical liquid, and improving discharge accuracy of the chemical liquid.

Abstract: A buffer tank section (6) includes a liquid accumulation chamber (61) communicating with, through a liquid introduction flow path (42), a liquid tank (46) accumulation chemical liquid. A filter section (4) includes a filter inlet (41a) and a filter outlet (41b), wherein the filter inlet (41a) communicates with a liquid discharge vent (60d) of the buffer tank section (6). In a pump (11), a pump inlet (11a) is connected to the filter outlet (41b) and a pump outlet (11b) is connected to a discharge nozzle (50) through a liquid discharge flow path (47). A return flow path (48) is connected between the pump outlet (11b) and the buffer tank section (6), wherein the chemical liquid, discharged from the pump (11), is returned to the liquid accumulation chamber (61). An exhaust flow path (49) is connected to the buffer tank section (6), thereby exhausting air in the liquid accumulation chamber (61).

Abstract: A filter unit in which a solution storage chamber for storing a chemical liquid supplied from a solution tank and a filter material housing chamber for filtering the chemical liquid in the solution storage chamber by a filter to supply the chemical liquid to a pump are integrally formed is integrally arranged together with the pump. An exhaust path for exhausting air in a solution guide path for causing the solution storage chamber to communicate with the solution tank and the solution storage chamber, and a pump inlet-side path for causing the filter material housing chamber to communicate with the pump are arranged.

Abstract: To eliminate influence of discharge amounts depending on changes in liquid level of a liquid storage tank and to improve discharge accuracy of a liquid discharging apparatus. By a pressure regulating opening portion for forming a reference liquid surface maintaining a given pressure, pressure inside a pump chamber before a discharging operation is kept constant without affecting liquid level existing in the liquid storage tank. Therefore, volume of the inside of the pump chamber is kept constant and liquid can be discharged with higher precision.

Abstract: A filter unit in which a solution storage chamber for storing a chemical liquid supplied from a solution tank and a filter material housing chamber for filtering the chemical liquid in the solution storage chamber by a filter to supply the chemical liquid to a pump are integrally formed is integrally arranged together with the pump. An exhaust path for exhausting air in a solution guide path for causing the solution storage chamber to communicate with the solution tank and the solution storage chamber, and a pump inlet-side path for causing the filter material housing chamber to communicate with the pump are arranged.

Abstract: To eliminate influence of discharge amounts depending on changes in liquid level of a liquid storage tank and to improve discharge accuracy of a liquid discharging apparatus.

Abstract: Impure portions such as air bubbles and gelled portions in a liquid are removed so that the liquid can be discharged with improved cleanliness. Under condition that a return flow path and a liquid discharge flow path are closed, a pump chamber is expanded, thereby sucking the liquid in a liquid container portion into a pump chamber through a filter. Under condition that a vent port of the filter and the return flow path are opened and a liquid introducing flow path, the liquid discharge flow path, and a pump inlet flow path are closed, the pump chamber is contracted, thereby returning the liquid in the pump chamber toward the filter so that air in the filter is exhausted to the outside. Under condition that the return flow path and the pump inlet flow path are closed, the pump chamber is contracted, thereby discharging the liquid from the nozzle.

Abstract: Connected to a flexible tube 13 which is expandable or shrinkable in the radial direction, are a flowpath 17 on the side of supply, which is provided therein with an on-off valve 21 on the side of supply, and a flowpath 19 on the side of discharge, which is provided therein with an on-off valve 22 on the side of discharge. A bellows 14 elastically deformable in the axial direction is disposed at the outside of the flexible tube 13. This bellows 14 has a small bellows portion 24 and a large bellows portion 25. An incompressible medium 43 is enclosed in a pump chamber 42 formed between the flexible tube 13 and the bellows 14. An operating disk portion disposed between the small bellows portion 24 and the large bellows portion 25 is displaced in the axial direction, whereby the inner volume of the bellows 14 is changed, so that the flexible tube 13 is expanded or shrunk in the radial direction to carry out the pumping operation.

Abstract: A liquid medicine supplying system comprises a housing 11 including a pump chamber 27, a diaphragm 28 for changing a volume of the pump chamber 27, a first flow path 31 for guiding liquid in a liquid storage tank to the pump chamber 27 and a second flow path 32 for guiding the liquid stored in the pump chamber 27 to a liquid discharge portion. A first valve body 34 for on-off operating the first flow path 31 is disposed in the first flow path 31. A second valve body 35 for on-off operating the second flow path 32 is disposed in the second flow path 32. Furthermore, a magnet 41 on the follow up side is provided in the valve body 34 and the second valve body 35. Then, in the housing 11, there are provided magnets 43a, 44a and the like cause the magnetic field to act on the magnet 41 on the follow up side, whereby the first valve body 34 and the second valve body 35 are set at opening positions or closing positions.