Patents by Inventor Takeshi Kamino
Takeshi Kamino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10978505Abstract: A hybrid-bonding-type solid-state imaging device is provided that prevents moisture from entering through the bonded interface and other areas. The solid-state imaging device includes a first interconnect structure over a sensor substrate and a second interconnect structure over a logic substrate, and the first and second interconnect structures are bonded together. At the bonded surface between the first and second interconnect structures, bonding pads formed in the first interconnect structure are bonded to bonding pads formed in the second interconnect structure. Eighth layer portions of a first seal ring formed in the first interconnect structure are bonded to eighth layer portions of a second seal ring formed in the second interconnect structure.Type: GrantFiled: February 19, 2019Date of Patent: April 13, 2021Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Hidenori Sato, Koji Iizuka, Takeshi Kamino
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Patent number: 10566367Abstract: The performances of a semiconductor device are improved. A semiconductor device has a transfer transistor and a photodiode. The photodiode has an n type semiconductor region, an n+ type semiconductor region, and a second p type semiconductor region surrounded by a first p type semiconductor region of an interpixel isolation region. The n+ type semiconductor region is formed on the main surface side of the semiconductor substrate, and the n type semiconductor region is formed under the n+ type semiconductor region via the second p type semiconductor region. In the channel length direction of the transfer transistor, in the n type semiconductor region, an n?? type semiconductor region having a lower impurity density than that of the n type semiconductor region is arranged, to improve the transfer efficiency of electric charges accumulated in the photodiode.Type: GrantFiled: February 20, 2018Date of Patent: February 18, 2020Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Yotaro Goto, Takeshi Kamino, Fumitoshi Takahashi
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Patent number: 10559623Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: GrantFiled: May 22, 2019Date of Patent: February 11, 2020Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Takahiro Tomimatsu
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Patent number: 10504950Abstract: In order to improve the performance of a solid-state imaging device, the solid-state imaging device has a pixel including a photoelectric conversion unit and a transfer transistor, and fluorine is introduced to a gate electrode and a drain region (extension region and n+-type semiconductor region) of the transfer transistor included in the pixel.Type: GrantFiled: March 16, 2018Date of Patent: December 10, 2019Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Fumitoshi Takahashi, Yotaro Goto
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Publication number: 20190280041Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: ApplicationFiled: May 22, 2019Publication date: September 12, 2019Inventors: Takeshi Kamino, Takahiro Tomimatsu
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Publication number: 20190273108Abstract: A hybrid-bonding-type solid-state imaging device is provided that prevents moisture from entering through the bonded interface and other areas. The solid-state imaging device includes a first interconnect structure over a sensor substrate and a second interconnect structure over a logic substrate, and the first and second interconnect structures are bonded together. At the bonded surface between the first and second interconnect structures, bonding pads formed in the first interconnect structure are bonded to bonding pads formed in the second interconnect structure. Eighth layer portions of a first seal ring formed in the first interconnect structure are bonded to eighth layer portions of a second seal ring formed in the second interconnect structure.Type: ApplicationFiled: February 19, 2019Publication date: September 5, 2019Inventors: Hidenori SATO, Koji IIZUKA, Takeshi KAMINO
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Patent number: 10319779Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: GrantFiled: June 21, 2018Date of Patent: June 11, 2019Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Takahiro Tomimatsu
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Publication number: 20180358394Abstract: In order to improve the performance of a solid-state imaging device, the solid-state imaging device has a pixel including a photoelectric conversion unit and a transfer transistor, and fluorine is introduced to a gate electrode and a drain region (extension region and n+-type semiconductor region) of the transfer transistor included in the pixel.Type: ApplicationFiled: March 16, 2018Publication date: December 13, 2018Inventors: Takeshi KAMINO, Fumitoshi TAKAHASHI, Yotaro GOTO
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Patent number: 10115751Abstract: An improvement is achieved in the performance of a semiconductor device. A semiconductor device includes a pixel including a first active region where a photodiode and a transfer transistor are formed and a second active region for supplying a grounding potential. Over a p-type semiconductor region in the second active region, a plug for supplying the grounding potential is disposed. In an n-type semiconductor region for a drain region of the transfer transistor formed in the first active region, a gettering element is introduced. However, in the p-type semiconductor region in the second active region, the gettering element is not introduced.Type: GrantFiled: November 30, 2016Date of Patent: October 30, 2018Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Yotaro Goto
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Publication number: 20180308884Abstract: The performances of a semiconductor device are improved. A semiconductor device has a transfer transistor and a photodiode. The photodiode has an n type semiconductor region, an n+ type semiconductor region, and a second p type semiconductor region surrounded by a first p type semiconductor region of an interpixel isolation region. The n+ type semiconductor region is formed on the main surface side of the semiconductor substrate, and the n type semiconductor region is formed under the n+ type semiconductor region via the second p type semiconductor region. In the channel length direction of the transfer transistor, in the n type semiconductor region, an n?? type semiconductor region having a lower impurity density than that of the n type semiconductor region is arranged, to improve the transfer efficiency of electric charges accumulated in the photodiode.Type: ApplicationFiled: February 20, 2018Publication date: October 25, 2018Inventors: Yotaro Goto, Takeshi Kamino, Fumitoshi Takahashi
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Publication number: 20180301503Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: ApplicationFiled: June 21, 2018Publication date: October 18, 2018Inventors: Takeshi Kamino, Takahiro Tomimatsu
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Patent number: 10056420Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.Type: GrantFiled: November 30, 2016Date of Patent: August 21, 2018Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Yotaro Goto
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Patent number: 10026775Abstract: The performances of a semiconductor device are improved. A semiconductor device has a photodiode and a transfer transistor formed in a pixel region. Further, the semiconductor device has a second transistor formed in a peripheral circuit region. The transfer transistor includes a first gate electrode, and a film part formed of a thick hard mask film formed over the first gate electrode. The second transistor includes a second gate electrode, source/drain regions, silicide layers formed at the upper surface of the second gate electrode, and the upper surfaces of the source/drain regions.Type: GrantFiled: February 22, 2016Date of Patent: July 17, 2018Assignee: Renesas Electronics CorporationInventor: Takeshi Kamino
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Patent number: 10020345Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: GrantFiled: October 19, 2017Date of Patent: July 10, 2018Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Takahiro Tomimatsu
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Publication number: 20180040664Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: ApplicationFiled: October 19, 2017Publication date: February 8, 2018Inventors: Takeshi Kamino, Takahiro Tomimatsu
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Patent number: 9806126Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: GrantFiled: January 12, 2017Date of Patent: October 31, 2017Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Takahiro Tomimatsu
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Publication number: 20170213862Abstract: An improvement is achieved in the performance of a semiconductor device. A semiconductor device includes a pixel including a first active region where a photodiode and a transfer transistor are formed and a second active region for supplying a grounding potential. Over a p-type semiconductor region in the second active region, a plug for supplying the grounding potential is disposed. In an n-type semiconductor region for a drain region of the transfer transistor formed in the first active region, a gettering element is introduced. However, in the p-type semiconductor region in the second active region, the gettering element is not introduced.Type: ApplicationFiled: November 30, 2016Publication date: July 27, 2017Applicant: Renesas Electronics CorporationInventors: Takeshi KAMINO, Yotaro GOTO
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Publication number: 20170125478Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: ApplicationFiled: January 12, 2017Publication date: May 4, 2017Inventors: Takeshi Kamino, Takahiro Tomimatsu
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Publication number: 20170084658Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.Type: ApplicationFiled: November 30, 2016Publication date: March 23, 2017Inventors: Takeshi KAMINO, Yotaro GOTO
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Patent number: 9576993Abstract: An offset spacer film (OSS) is formed on a side wall surface of a gate electrode (NLGE, PLGE) to cover a region in which a photo diode (PD) is disposed. Next, an extension region (LNLD, LPLD) is formed using the offset spacer film and the like as an implantation mask. Next, process is provided to remove the offset spacer film covering the region in which the photo diode is disposed. Next, a sidewall insulating film (SWI) is formed on the side wall surface of the gate electrode. Next, a source-drain region (HPDF, LPDF, HNDF, LNDF) is formed using the sidewall insulating film and the like as an implantation mask.Type: GrantFiled: October 29, 2012Date of Patent: February 21, 2017Assignee: Renesas Electronics CorporationInventors: Takeshi Kamino, Takahiro Tomimatsu