Abstract: An OLT connected with a controller managing slices includes a bandwidth allocating unit capable of allocating bandwidths in a PON system to ONUs through allocation methods, a slice managing unit that calculates a guaranteed delay time for each allocation method, receives, from the controller, a resource reservation request including a bandwidth requested to be reserved in the PON system for a slice and a requested delay time, and determines an allocation method associated with the request based on the requested delay time and the guaranteed delay time for each allocation method, and a resource information generating unit that holds, as abstract resource information, an available bandwidth for the guaranteed delay times of each ONUs, calculates an available bandwidth in the allocation method of the associated ONU based on the allocation method associated with the request and the requested bandwidth, and updates and transmits the abstract resource information, to the controller.

Abstract: A network controller is configured to perform, to a new slice request, resource allocation from a resource of unallocated resource information managed by a resource information management unit, and to reallocate the resource to an existing slice request so that an unallocated resource increases based on unallocated resource information managed by the resource information management unit.

Abstract: A semiconductor device includes a first electrode and a second electrode configuring a MIM capacitor. The first electrode includes a first via plug extending along a first direction. The second electrode includes a second lower wiring extending along the first direction and arranged side by side with the first via plug in a second direction. A length of the first via plug in the first direction is larger than a length of the first via plug in the second direction. A length of the second lower wiring in the first direction is larger than a length of the second lower wiring in the second direction. A length of the first via plug in a third direction is larger than a length of the second lower wiring in the third direction.

Abstract: There is provided a semiconductor memory device for preventing an increase of a cell area of a Shadow RAM comprising a portion of an SRAM memory cell and a ferroelectric capacitor connected to a storage node of the portion of the SRAM memory cell and achieving high capacitance formation of a storage capacitor. The Shadow RAM is provided with a relay wiring layer between a wiring layer corresponding to the storage node and a lower electrode of the ferroelectric capacitor, a wiring corresponding to the storage node is connected to a relay wiring via a first and a second opening portion arranged at a first interval and the lower electrode of the ferroelectric capacitor is connected to a relay wiring via a third and a fourth opening portion arranged at a second interval narrower than the first interval.

Abstract: An interlayer insulating film, contacts, and wirings are formed on a MOS transistor formed on a silicon substrate. Another interlayer insulating film and contacts are formed thereon. Subsequently, as a first heat treatment, a heat treatment is performed in a hydrogen atmosphere or a nitrogen- or otherwise-diluted hydrogen atmosphere at a temperature of the order of 300-500° C. for about 5-60 minutes, thereby recovering defects that occur in the MOS transistor and insulating film forming steps and the like. Then, a ferroelectric capacitor connected to either diffusion layer of the MOS transistor is formed along with wirings, electrodes, and the like. Thereafter, as a second heat treatment, a heat treatment is performed in nitrogen at a temperature of the order of 300-500° C. for about 5-60 minutes. This recovers defects that occur after the first heat treatment step.

Abstract: There is provided a semiconductor memory device for preventing an increase of a cell area of a Shadow RAM comprising a portion of an SRAM memory cell and a ferroelectric capacitor connected to a storage node of the portion of the SRAM memory cell and achieving high capacitance formation of a storage capacitor. The Shadow RAM is provided with a relay wiring layer between a wiring layer corresponding to the storage node and a lower electrode of the ferroelectric capacitor, a wiring corresponding to the storage node is connected to a relay wiring via a first and a second opening portion arranged at a first interval and the lower electrode of the ferroelectric capacitor is connected to a relay wiring via a third and a fourth opening portion arranged at a second interval narrower than the first interval.

Abstract: A consolidated LSI including a logic circuit section and a FeRAM section formed on a single chip has a hydrogen barrier layer covering the cell array of the FeRAM section. The hydrogen barrier layer is made of plasma CVD SiON and has an excellent hydrogen barrier function. The hydrogen barrier layer protects the ferroelectric film of a ferroelectric capacitor an against the hydrogen-annealing process in the fabrication a process for the consolidated LSI.

Abstract: An interlayer insulating film, contacts, and wirings are formed on a MOS transistor formed on a silicon substrate. Another interlayer insulating film and contacts are formed thereon. Subsequently, as a first heat treatment, a heat treatment is performed in a hydrogen atmosphere or a nitrogen- or otherwise-diluted hydrogen atmosphere at a temperature of the order of 300-500° C. for about 5-60 minutes, thereby recovering defects that occur in the MOS transistor and insulating film forming steps and the like. Then, a ferroelectric capacitor connected to either diffusion layer of the MOS transistor is formed along with wirings, electrodes, and the like. Thereafter, as a second heat treatment, a heat treatment is performed in nitrogen at a temperature of the order of 300-500° C. for about 5-60 minutes. This recovers defects that occur after the first heat treatment step.