Abstract: A plurality of resistance-imparting portions (34A to 34E) are disposed adjacent to each other. A first contraction flow portion forming one of the resistance-imparting portions (34A to 34E) adjacent to each other is in communication with an enlarged diameter portion forming another resistance-imparting portion. First contraction flow portions (32AH to 32DH) forming the resistance-imparting portions (34A to 34E) adjacent to each other are disposed at different positions in a direction in which an outer frame member (31) extends.

Abstract: The present invention discloses a compact and inexpensive linear motor table. The above effects of the present invention are achieved by allowing at least one of either the bed or table to also serve as the yoke, or the magnetic circuit portion, of a linear electromagnetic actuator in addition to its inherent function.

Abstract: An XY table that uses linear electromagnetic actuators to achieve faster operating speeds, improve durability, prevent generation of dust and reduce size (make more compact). The cord for supplying electrical power to the linear electromagnetic actuators and the cords for obtaining signals from each type of sensor are concentrated at an intermediate movement member (X table), and gathered together into a single cord that is used for connection to the outside (controller, etc.). As a result, detrimental effects caused by the cord are minimized which enables the XY table to demonstrate the performance described above.