Abstract: A method and apparatus for repairing defect portions of a photomask. A complex material from which a light shading material can be deposited is applied over the photomask. A white (blank) defect region is irradiated with a continuous wave laser light beam projected in a slit-like light image to thereby convert the complex material into the shading material. After washing, a half-deposited portion formed in a peripheral portion of the light shading region is further deposited by a post-baking process. Those portions of the light shading film which depart from the desired mask pattern are removed together with black (solid) defect portion originally present in the photomask through irradiation with a pulse laser light beam. The pulse laser is constituted by a Dye-laser, while the continuous wave laser is constituted by an Ar-laser. A specific half-mirror which transmits therethrough Ar-laser light while reflecting Dye-laser light is displaceable provided.

Abstract: A method and apparatus for correcting transparent defects on a photomask are disclosed. A metal-organic complex solution is applied to a transparent defect portion and its periphery on the photomask. The transparent defect portion is then exposed to a visible ray or ultraviolet ray to deposit a metal, a metal oxide or a composition thereof, while the light transmission quantity through the transparent defect portion is measured. After the measurement falls below a predetermined level relative to the quantity of the transmitted light at the start of exposure, the exposure is terminated to thereby complete the correction of the transparent defects.

Abstract: The laser light emitted from a laser generator is cast on two prisms which have the same angle of deflection and are supported rotatably by support members so as to be rotated about the optical axis of the laser light in the opposite directions at the same speed. The laser beam scanned through the rotations of the two prisms is focussed on a work piece by a convergence lens so that the work piece is linearly scanned for laser-working. Moreover, there are provided a pair of scanning sections, each comprising such a pair of prisms as described above, the scanning sections being so arranged that the directions of scanning the laser beam by the respective sections may be perpendicular to each other. The rotational speeds of the prisms of each scanning section is so controlled as to subject the spot of the laser beam to two-dimensional scanning for laser-working a work piece.