Abstract: A cleaning apparatus is provided which can prevent dust from being dispersed into the surrounding area. The cleaning apparatus comprises a cover member which covers the cleaning target location of the article support platform, a blower which moves air toward the cleaning target location within an area surrounded by the cover member, and a dust collector which collects dust that is lifted by movement of air caused by the blower.

Abstract: A clean room of the down-flow type has, arranged therein an article processing apparatus A for performing a predetermined processing on articles, and an article storage apparatus B having a plurality of article storage units 5. An overlapping apparatus portion is disposed above article receiving portions 15 of the article processing apparatus A in a vertically overlapping relationship. An air guide passage 16 is formed for guiding clean air blown downward from a ceiling area of the clean room, from a rear air passage L to positions under the article storage unit 5 in the overlapping apparatus portion. An air outlet 17 is provided for blowing the air guided by the air guide passage 16 below the article storage units 5, downward toward the article processing apparatus A.

Abstract: A clean room of the down-flow type has, arranged therein an article processing apparatus A for performing a predetermined processing on articles, and an article storage apparatus B having a plurality of article storage units 5. An overlapping apparatus portion is disposed above article receiving portions 15 of the article processing apparatus A in a vertically overlapping relationship. An air guide passage 16 is formed for guiding clean air blown downward from a ceiling area of the clean room, from a rear air passage L to positions under the article storage unit 5 in the overlapping apparatus portion. An air outlet 17 is provided for blowing the air guided by the air guide passage 16 below the article storage units 5, downward toward the article processing apparatus A.