Abstract: A solvent containing low-boiling and high-boiling impurities in an evaporating section, so that the high-boiling impurities is left as a tank bottom waste, and a solvent vapor from the section is guide through a mist separator into a condenser. A condensate produced in the condenser is returned to the mist separator so as to serve as a mist catching liquid. A fraction not having condensed in the condenser is fed to a rectifying section where fractional condensation is performed so that the low-boiling impurities are condensed to be removed. A remainder of the solvent vapor from which the impurities have been removed is also condensed and recovered for reuse in the resist washing/exfoliating step during manufacture of liquid crystal devices or IC, so that the soiled solvent need not be discarded or treated in a remote cite, thereby facilitating the process or the step using the solvent.