Abstract: A sulfonium salt of specific structure has a high decomposition efficiency and a high acid diffusion controlling ability upon exposure. A resist composition comprising the sulfonium salt offers a high sensitivity, reduced LWR and improved CDU independent of whether it is of positive or negative tone.

Abstract: A resist composition comprising a quencher containing a sulfonium salt composed of a C5-C20 aromatic carboxylic acid anion substituted with a halogen atom or a halogen atom-containing group and a sulfonium cation having the following formula (1).

Abstract: A resist composition comprising a base polymer comprising repeat units having a salt structure consisting of a sulfonic acid anion bonded to a polymer backbone and a sulfonium cation having formula (1).

Abstract: A resist composition comprising a sulfonium salt composed of a sulfonate anion having a carbon atom to which an iodine atom is bonded and a sulfonium cation having the formula (1) exhibits a high sensitivity and reduced LWR or improved CDU.

Abstract: An object of the present invention is to improve reliability after the control of a microcomputer recovers. A signal control apparatus according to the present invention includes a microcomputer, an output control unit that receives a reset signal and a load control signal from the microcomputer and outputs a load output signal to a load, and when the output control unit receives the reset signal, the output control unit maintains a state of the load output signal immediately before the reset signal is received, and when the load control signal is switched, the output control unit releases the maintaining state of the load output signal.

Abstract: An object of the present invention is to improve reliability after the control of a microcomputer recovers. A signal control apparatus according to the present invention includes a microcomputer, an output control unit that receives a reset signal and a load control signal from the microcomputer and outputs a load output signal to a load, and when the output control unit receives the reset signal, the output control unit maintains a state of the load output signal immediately before the reset signal is received, and when the load control signal is switched, the output control unit releases the maintaining state of the load output signal.

Abstract: A motor control device avoids the difficulties associated with safely controlling a motor using a second calculation unit when a first calculation unit malfunctions. A motor control device monitors a malfunction of a first microcomputer and a malfunction of a first CPU of the first microcomputer and performs a determination based on a result of a second external communication functional unit. When the determination is normal, the process proceeds determine that the first CPU is normal and a second CPU malfunctions. Therefore, it is possible to continue processing using the first CPU in this case.

Abstract: An object of the present invention is to diagnose a state of a voltage divider while performing a normal measurement to improve reliability. A voltage detection apparatus according to the present invention includes: a first resistor for dividing voltage of a detection unit into a first divided voltage value; and a test pattern insertion circuit unit including a second resistor for dividing the first divided voltage value into a second divided voltage value and a switching device, wherein the test pattern insertion circuit unit is connected to an equipotential connection point to the first divided voltage value, and wherein a state of the first resistor is detected based on the second divided voltage value when the switching device is conductive.

Abstract: A motor control device avoids the difficulties associated with safely controlling a motor using a second calculation unit when a first calculation unit malfunctions. A motor control device monitors a malfunction of a first microcomputer and a malfunction of a first CPU of the first microcomputer and performs a determination based on a result of a second external communication functional unit. When the determination is normal, the process proceeds determine that the first CPU is normal and a second CPU malfunctions. Therefore, it is possible to continue processing using the first CPU in this case.

Abstract: An object of the present invention is to diagnose a state of a voltage divider while performing a normal measurement to improve reliability. A voltage detection apparatus according to the present invention includes: a first resistor for dividing voltage of a detection unit into a first divided voltage value; and a test pattern insertion circuit unit including a second resistor for dividing the first divided voltage value into a second divided voltage value and a switching device, wherein the test pattern insertion circuit unit is connected to an equipotential connection point to the first divided voltage value, and wherein a state of the first resistor is detected based on the second divided voltage value when the switching device is conductive.