Abstract: In a capacitively coupled plasma processing apparatus, a susceptor (lower electrode) 16 within a decompression chamber 10 faces an upper electrode 46 serving as a shower head. The susceptor 16 is electrically connected with a first high frequency power supply 36 and a second high frequency power supply 38 via matching devices 40 and 42, respectively. The first high frequency power supply 36 is formed of a linear amplifier type high frequency power supply and outputs a first high frequency power RF1 for plasma generation. The second high frequency power supply 38 is formed of a switching type high frequency power supply and outputs a second high frequency power RF2 for ion attraction. A residual high frequency power removing unit 74 is connected to a high frequency power supply line 45 on a side of the second high frequency power supply 38.

Abstract: In a capacitively coupled plasma processing apparatus, a susceptor (lower electrode) 16 within a decompression chamber 10 faces an upper electrode 46 serving as a shower head. The susceptor 16 is electrically connected with a first high frequency power supply 36 and a second high frequency power supply 38 via matching devices 40 and 42, respectively. The first high frequency power supply 36 is formed of a linear amplifier type high frequency power supply and outputs a first high frequency power RF1 for plasma generation. The second high frequency power supply 38 is formed of a switching type high frequency power supply and outputs a second high frequency power RF2 for ion attraction. A residual high frequency power removing unit 74 is connected to a high frequency power supply line 45 on a side of the second high frequency power supply 38.

Abstract: A high frequency power supply device includes a high frequency power generation unit configured to output a high frequency power to be supplied to a load and a control unit configured to detect a mean value of the high frequency power to control the high frequency power generation unit. A power change period detection unit detects a period of a level change of the high frequency power that is detected at an output side of the high frequency power generation unit due to a periodic change of a level of a high frequency power that is given to a load from another high frequency power supply device as a power change period TZ. A control period setting unit sets a control period TC to an appropriate value in accordance with the power change period TZ detected by the power change period detection unit.

Abstract: A high frequency power supply device includes a high frequency power generation unit configured to output a high frequency power to be supplied to a load and a control unit configured to detect a mean value of the high frequency power to control the high frequency power generation unit. A power change period detection unit detects a period of a level change of the high frequency power that is detected at an output side of the high frequency power generation unit due to a periodic change of a level of a high frequency power that is given to a load from another high frequency power supply device as a power change period TZ. A control period setting unit sets a control period TC to an appropriate value in accordance with the power change period TZ detected by the power change period detection unit.

Abstract: A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).

Abstract: A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).

Abstract: The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value.

Abstract: The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value.