Abstract: An impedance matching device includes: a variable capacitor in which a plurality of first capacitance elements or a plurality of second capacitance elements are connected in parallel; a calculation unit that calculates an impedance or a reflection coefficient on the load side using information regarding the impedance acquired from the outside; and a control unit that determines an ON/OFF state to be taken by each of semiconductor switches included in the variable capacitor using the impedance or the reflection coefficient calculated by the calculation unit and turns on or off the semiconductor switches included in the first or second capacitance element based on the determined state. The control unit cyclically switches semiconductor switches to be turned on or off in a predetermined order.

Abstract: An impedance adjustment device includes a variable capacitor unit. A microcomputer changes the capacitance value of the variable capacitor unit by switching PIN diodes included in n capacitor circuits on or off separately. Thus, the impedance on the plasma generator side when viewed from a high frequency power supply is adjusted. When changing the capacitance value of the variable capacitor unit to a target capacitance value, the microcomputer changes the capacitance value. When a predetermined period passes after the change of the capacitance value, the microcomputer changes the capacitance value again.

Abstract: An impedance adjustment device includes a variable capacitor unit. A microcomputer changes the capacitance value of the variable capacitor unit by switching on or off PIN diodes included in n capacitor circuits separately. Thus, the impedance on the plasma generator side when viewed from a high frequency power supply is adjusted. When changing the capacitance value of the variable capacitor unit to a target capacitance value, the microcomputer changes the capacitance value to a relay capacitance value different from the target capacitance value. The microcomputer changes the capacitance value to the target capacitance value after the capacitance value is changed to the relay capacitance value.

Abstract: A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

Abstract: Proposed are techniques for suppressing an increase in a reflected wave power Pr (synonymous with a reflection coefficient) due to IMD. A high-frequency power supply system for providing a high-frequency power to a connected load includes: a bias power supply that outputs a bias power at a first frequency: a source power supply that outputs a source power at a second frequency higher than the first frequency; and a matching unit including an impedance matching circuit that acquires the bias power and the source power, and provides matching between an impedance on the source power supply side and an impedance on the load side. The source power supply supplies the bias power supply with a sinusoidal synchronizing signal including information about an output frequency to be outputted by the bias power supply, and the bias power supply outputs the bias power of a frequency corresponding to the output frequency included in the sinusoidal synchronizing signal.

Abstract: An impedance matching device comprises a variable capacitor including multiple capacitance elements and connected in parallel having capacitors and each having one end connected in series to a high-frequency power source and semiconductor switches and connected to the respective capacitors, and a control unit. The control unit derives a reflection coefficient based on the obtained information concerning an impedance viewed from the high-frequency power source toward the load side, updates the states of the respective semiconductor switches and included in the multiple capacitance elements and with a first cycle in the case where the reflection coefficient is equal to or more than a predetermined value, and updates the states of the respective semiconductor switches and included in the plurality of capacitance elements and with a second cycle longer than the first cycle in the case where the reflection coefficient is less than the predetermined value.

Abstract: An impedance matching device includes: a variable capacitor in which a plurality of series circuits of capacitors and semiconductor switches are connected in parallel; a calculation unit that calculates an impedance or a reflection coefficient on the load side using information regarding impedance acquired from the outside; and a control unit that determines ON/OFF states to be taken by the semiconductor switches included in the variable capacitor using the impedance or the reflection coefficient calculated by the calculation unit and turns on or off the semiconductor switches based on the determined states. The control unit changes an ON/OFF control timing between one and another of the semiconductor switches.

Abstract: An impedance matching device includes: a variable capacitor in which a plurality of series circuits of capacitors and semiconductor switches are connected in parallel; a calculation unit that calculates an impedance or a reflection coefficient on the load side using information regarding impedance acquired from the outside; and a control unit that determines ON/OFF states to be taken by the semiconductor switches included in the variable capacitor using the impedance or the reflection coefficient calculated by the calculation unit and turns on or off the semiconductor switches based on the determined states. The control unit changes an ON/OFF control timing between one and another of the semiconductor switches.

Abstract: A drive circuit performs switching between an on-state and an off-state of a PIN diode, the drive circuit being provided with a switching element and a switching element, a drive power supply, and a current limiting resistor that adjusts a forward current of the PIN diode. When the switching element is in an on-state and the switching element is in an off-state, the PIN diode is switched to the on-state by applying a forward voltage to the PIN diode from the drive power supply via the current limiting resistor, and when the switching element is in the off-state and the switching element is in the on-state, the PIN diode is switched to the off-state by applying, not via the current limiting resistor, a reverse voltage to the PIN diode from the drive power supply.

Abstract: A drive circuit performs switching between an on-state and an off-state of a PIN diode, the drive circuit being provided with a switching element and a switching element, a drive power supply, and a current limiting resistor that adjusts a forward current of the PIN diode. When the switching element is in an on-state and the switching element is in an off-state, the PIN diode is switched to the on-state by applying a forward voltage to the PIN diode from the drive power supply via the current limiting resistor, and when the switching element is in the off-state and the switching element is in the on-state, the PIN diode is switched to the off-state by applying, not via the current limiting resistor, a reverse voltage to the PIN diode from the drive power supply.

Abstract: In a PIN diode drive circuit, a forward voltage is applied to a PIN diode through a first switching element and a reverse voltage is applied to the PIN diode through a second switching element. A limiting unit limits an increase rate of an absolute value of a reverse recovery current to a value smaller than a threshold value, the reverse recovery current flowing through the PIN diode when a voltage applied to the PIN diode changes from a forward voltage to a reverse voltage. The threshold value is less than 1 time and 0.5 times or more of a maximum value of the increase rate when a second peak appears regarding the reverse recovery current.

Abstract: An impedance matching device is to be provided between a load and a high frequency power supply in which output power is modulated to a high output and a low output alternately. The impedance matching device calculates an impedance or a reflection coefficient of a case where the load side is viewed from an output end of the high frequency power supply. The impedance matching device performs, based on results of the calculations performed in a first period in which the output power is the high output and in a second period in which the output power is the low output, operations for the impedance matching in the subsequent second period and first period respectively. The impedance matching device achieves, based on results of these operations, the impedance matchings in the subsequent first period and second period respectively.

Abstract: In a PIN diode drive circuit, a forward voltage is applied to a PIN diode through a first switching element and a reverse voltage is applied to the PIN diode through a second switching element. A limiting unit limits an increase rate of an absolute value of a reverse recovery current to a value smaller than a threshold value, the reverse recovery current flowing through the PIN diode when a voltage applied to the PIN diode changes from a forward voltage to a reverse voltage. The threshold value is less than 1 time and 0.5 times or more of a maximum value of the increase rate when a second peak appears regarding the reverse recovery current.

Abstract: Provided is an impedance matching device for matching an impedance between a high-frequency power source and a load. The impedance matching device pertaining to the present invention is provided with: a matching circuit having variable capacitors, a capacitance of which is adjusted by an ON/OFF operation of a plurality of switches; a switch control unit for performing control for causing states of the switches of the variable capacitors to coincide with a target state in order to adjust the capacitance of the variable capacitors; and a switch state evaluation unit for evaluating whether a switch is in a state requiring suppression of a temperature increase. The switch control unit is configured so that when the switch state evaluation unit evaluates that a switch of the variable capacitors is in a state requiring suppression of a temperature increase, control is performed for suspending changing of a switch state of the switch for a set period and suppressing a temperature increase in the switch.

Abstract: An impedance matching device includes: a variable capacitor; a calculation unit that calculates a reflection coefficient on the load side; a storage unit that stores the reflection coefficient calculated within a predetermined period so as to be associated with ON/OFF states of the semiconductor switches; a determination unit that determines ON/OFF states to be taken by the semiconductor switches using a calculation result within the predetermined period; a control unit that turns on or off the semiconductor switches based on the determined ON/OFF states; and a counting unit that counts the number of times the determined ON/OFF states have changed. In a case where the counted number of times is larger than a predetermined number of times, the control unit turns on or off the semiconductor switches so as to match ON/OFF states associated with a reflection coefficient closer to 0, among the stored reflection coefficients, and then prohibits ON/OFF switching.

Abstract: An impedance matching device includes: a variable capacitor in which a plurality of series circuits of capacitors and semiconductor switches are connected in parallel; a calculation unit that calculates an impedance or a reflection coefficient on the load side using information regarding impedance acquired from the outside; and a control unit that determines ON/OFF states to be taken by the semiconductor switches included in the variable capacitor using the impedance or the reflection coefficient calculated by the calculation unit and turns on or off the semiconductor switches based on the determined states. The control unit changes an ON/OFF control timing between one and another of the semiconductor switches.

Abstract: An impedance matching device includes: a variable capacitor in which a plurality of first capacitance elements or a plurality of second capacitance elements are connected in parallel; a calculation unit that calculates an impedance or a reflection coefficient on the load side using information regarding the impedance acquired from the outside; and a control unit that determines an ON/OFF state to be taken by each of semiconductor switches included in the variable capacitor using the impedance or the reflection coefficient calculated by the calculation unit and turns on or off the semiconductor switches included in the first or second capacitance element based on the determined state. The control unit cyclically switches semiconductor switches to be turned on or off in a predetermined order.

Abstract: An impedance matching device comprises a variable capacitor including multiple capacitance elements and connected in parallel having capacitors and each having one end connected in series to a high-frequency power source and semiconductor switches and connected to the respective capacitors, and a control unit. The control unit derives a reflection coefficient based on the obtained information concerning an impedance viewed from the high-frequency power source toward the load side, updates the states of the respective semiconductor switches and included in the multiple capacitance elements and with a first cycle in the case where the reflection coefficient is equal to or more than a predetermined value, and updates the states of the respective semiconductor switches and included in the plurality of capacitance elements and with a second cycle longer than the first cycle in the case where the reflection coefficient is less than the predetermined value.

Abstract: An impedance matching device 1 includes multiple capacitance elements and a control unit that controls on or off of semiconductor switches. The capacitance elements and respectively include a first capacitance element group and a second capacitance element group. The control unit updates the state of the first semiconductor switch included in the first capacitance element group with a first cycle until a predetermined time period elapses during which the state of the first semiconductor switch included in the first capacitance element group is maintained while the control unit updates the states of the semiconductor switch and respectively included in the first capacitance element group and the second capacitance element group with a second cycle longer than the first cycle after the predetermined time period elapses during which the state of the first semiconductor switch included in the first capacitance element group is maintained.

Abstract: A power supply management system according to an embodiment of the present invention includes a fee setting unit configured to set power fee unit prices (first power fee unit price and second power fee unit price) for each time slot, and a notification unit configured to notify a consumer of information on the set power fee unit prices. The first power fee unit price is a power unit price for a household electrical load, and the second power fee unit price is a power unit price in a case of using a charge/discharge device to charge a vehicle-mounted storage battery. The fee setting unit is configured to set, by predicting a load factor of a transformer, a discount rate of the second power fee unit price to become higher (second power fee unit price to become lower) as the predicted load factor becomes lower. The second power fee unit price is determined on the basis of the first power fee unit price and the discount rate.