Abstract: A cleaning machine comprises a loader section for transferring a to-be-processed object, an unloader section for transferring a processed object, a chemical liquid bath for cleaning the to-be-processed object with chemical liquid, a plurality of cleaning units, sequentially arrayed at a lower stream of the chemical liquid bath in a direction from the loader section to the unloader section, having a water cleaning bath for cleaning the to-be-processed object with pure water, a plurality of transfer machines for transferring the to-be-processed object between the loader section and the cleaning unit adjacent to the loader section, between the adjacent cleaning units, and between the unloader section and the cleaning unit adjacent to the unloader section, sequentially, a plurality of sensors, provided in the chemical liquid bath and the cleaning units, for detecting a chemical liquid state and a cleaning operation state, and control means for executing a process for measurement against abnormality in response to

Abstract: A display displays a processing procedure of a cleaning machine comprising a loader for loading a to-be-processed object, an unloader for unloading a processed object, and a plurality of processing units sequentially disposed between the loader and the unloader in the downstream direction to clean the to-be-processed object.