Abstract: An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.

Abstract: An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.

Abstract: An exposure apparatus for use in fabricating a printed circuit board. A thermally-written liquid-crystal light valve is provided in which a pattern is formed by opaque portions and transparent portions. A writing optical system directs a heating spot light onto the light valve. The light valve and/or the heating spot light is movable, relative to the other. A projecting optical system is arranged which transmits a luminous flux emitted from a light source, through a liquid-crystal layer within the liquid-crystal light valve. The projecting optical system illuminates a subject with the transmitted luminous flux.

Abstract: An f..theta. lens system which incorporates the advantages of a telecentric optical system and which is also achromatized so as to permit its use with a multi-mode laser. The lens system includes, in order from the light source side, of a first lens unit composed of one or two lens elements and which has a negative refractive power with a concave surface directed toward the light source side, a second lens unit composed of a positive meniscus lens having a convex surface directed toward the image side, a third lens unit composed of two positive lens elements and one negative lens element and which has a positive refractive power, and a fourth lens unit composed of two plano-convex lens elements and which is spaced a long distance from the third lens unit so as to be located at a position close to the image plane.

Abstract: A scanning optical device including a rotating polygonal mirror or oscillating mirror. Two acoustooptical devices are disposed along the path between the light source and the mirror and are set for respective time-constant angles of deflection to compensate for tilting of the mirror without introducing an offset.