Abstract: A vacuum pump ejector may include ejector body and a nozzle. The ejector body may have a passageway through which fluids may flow. The passageway may have an orifice. The nozzle may inject a purging gas to the orifice. The ejector may decrease a pressure between the vacuum pump and the scrubber, so that the vacuum pump may have improved efficiency. Thus, the vacuum pump may be effectively operated.

Abstract: An apparatus includes a rotation body having one or more rotary shafts having projections, and a cleaning part disposed adjacent to the projections, having one or more rotation holes into which the one or more rotary shafts are inserted, respectively, and configured to flow a cleaning material into the one or more rotation holes.

Abstract: Provided is a vacuum pump having a rotation body cleaning unit. The vacuum pump includes a case provided with rotation guide holes at opposite end parts. The case includes a rotation body placed inside the case and including a rotation shaft having opposite ends rotatably supported by the rotation guide holes and a number of lobes provided in the rotation shaft at predetermined intervals. Further, a cleaning part is supported by the case and placed in a space between the lobes and cleans the rotation body.

Abstract: A vacuum pump ejector may include ejector body and a nozzle. The ejector body may have a passageway through which fluids may flow. The passageway may have an orifice. The nozzle may inject a purging gas to the orifice. The ejector may decrease a pressure between the vacuum pump and the scrubber, so that the vacuum pump may have improved efficiency. Thus, the vacuum pump may be effectively operated.

Abstract: An apparatus includes a rotation body having one or more rotary shafts having projections, and a cleaning part disposed adjacent to the projections, having one or more rotation holes into which the one or more rotary shafts are inserted, respectively, and configured to flow a cleaning material into the one or more rotation holes.

Abstract: In an embodiment, a vacuum pump is capable of preventing adhesion of by-products to its surfaces. The vacuum pump includes a stator. The stator includes a cylinder wall and a pair of diaphragms disposed at opposite ends of the stator. A rotary shaft passes through the diaphragms, and a lobe is attached to the rotary shaft in the stator. The lobe may include a fluid port, and the fluid port may be disposed in sidewalls of the lobe to face the diaphragms. The rotary shaft may include a fluid supply path in communication with the fluid port.

Abstract: Provided are an exhaust pipe having turbulence wings, and an exhaust system. The exhaust pipe includes an outer pipe and an inner pipe. The exhaust pipe is connected to a scrubber of the exhaust system. The outer pipe has a gas inlet port. The inner pipe is installed in the outer pipe. A gap exists between the outer pipe and the inner pipe. The inner pipe includes a plurality of turbulence wings and gas discharge ports. The gas discharge ports are in communication with the gas inlet port via the gap. The turbulence wings project inward from the inner pipe and are disposed adjacent to the gas discharge ports. The inner pipe has an exhaust gas passage formed therein. When a gas is flowed through the gas discharge ports and over the turbulence wings, a jet layer is formed adjacent to an interior sidewall of the inner pipe. The jet layer forms a buffer between the exhaust gas passage and the inner pipe sidewalls.

Abstract: Provided is a vacuum pump having a rotation body cleaning unit. The vacuum pump includes a case provided with rotation guide holes at opposite end parts. The case includes a rotation body placed inside the case and including a rotation shaft having opposite ends rotatably supported by the rotation guide holes and a number of lobes provided in the rotation shaft at predetermined intervals. Further, a cleaning part is supported by the case and placed in a space between the lobes and cleans the rotation body.

Abstract: In an embodiment, a vacuum pump is capable of preventing adhesion of by-products to its surfaces. The vacuum pump includes a stator. The stator includes a cylinder wall and a pair of diaphragms disposed at opposite ends of the stator. A rotary shaft passes through the diaphragms, and a lobe is attached to the rotary shaft in the stator. The lobe may include a fluid port, and the fluid port may be disposed in sidewalls of the lobe to face the diaphragms. The rotary shaft may include a fluid supply path in communication with the fluid port.

Abstract: Provided are an exhaust pipe having turbulence wings, and an exhaust system. The exhaust pipe includes an outer pipe and an inner pipe. The exhaust pipe is connected to a scrubber of the exhaust system. The outer pipe has a gas inlet port. The inner pipe is installed in the outer pipe. A gap exists between the outer pipe and the inner pipe. The inner pipe includes a plurality of turbulence wings and gas discharge ports. The gas discharge ports are in communication with the gas inlet port via the gap. The turbulence wings project inward from the inner pipe and are disposed adjacent to the gas discharge ports. The inner pipe has an exhaust gas passage formed therein. When a gas is flowed through the gas discharge ports and over the turbulence wings, a jet layer is formed adjacent to an interior sidewall of the inner pipe. The jet layer forms a buffer between the exhaust gas passage and the inner pipe sidewalls.