Patents by Inventor Ted Yoshidome

Ted Yoshidome has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heater for processing chamber
    Patent number: 6350320
    Abstract: A gas delivery apparatus and method for directing a flow of gas to the edge of a substrate at an angle to the radial direction of the substrate is provided. The apparatus directs the gas from a gas opening, over a plurality of grooves that are angled relative to a radial line originating at a center of the gas delivery apparatus. Subsequently, the gas is flowed over a portion of the substrate to prevent reactive gases from depositing on selective portions of the substrate.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: February 26, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted Yoshidome, Nitin Khurana, Rod Mosely, Umesh Madhav Kelkar, Joseph Yudovsky, Alan Popiolkowski