Patents by Inventor Terry Bluck
Terry Bluck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240142290Abstract: Methods and systems for the measurement of molten metal and metal alloy levels within a crucible are provided. The system includes a crucible, a probe having an electrode disposed at a lowermost probe position, and a processing system configured to receive a signal from the electrode to evaluate whether the electrode is in contact with the liquid metal. The system can include a plurality of probes, with each probe having an electrode positioned at a different height within the crucible interior. A multi-probe system can inform a system user on molten metal levels at various sectors within the crucible interior.Type: ApplicationFiled: October 20, 2023Publication date: May 2, 2024Inventors: Ajay Balaram MORE, Sambhu KUNDU, PrasannaKalleshwara Buddappa RAMACHANDRAPPA, Terry BLUCK, Visweswaren SIVARAMAKRISHNAN
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Patent number: 11897811Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing sectionType: GrantFiled: January 31, 2022Date of Patent: February 13, 2024Assignee: INTEVAC, INC.Inventors: Terry Bluck, Wendell Thomas Blonigan
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Publication number: 20230274920Abstract: A linear processing system having an entry loadlock, a first multi-pass processing chamber coupled to the entry loadlock, the first multi-pass processing chamber having a sputtering magnetron arrangement and configured to house a single substrate carrier for performing a multi-pass processing; a single-pass chamber coupled to the first multi-pass processing chamber and having a plurality of magnetron arrangements arranged along a carrier travel direction, the single-pass chamber configured to house multiple carriers arranged serially in a row and configured for a single-pass processing; a second multi-pass processing chamber coupled to the single-pass processing chamber, the second multi-pass processing chamber having a sputtering magnetron arrangement and configured to house a single substrate carrier for performing a multi-pass processing; and an exit loadlock chamber coupled to the second multi-pass processing chamber.Type: ApplicationFiled: February 15, 2023Publication date: August 31, 2023Inventors: Terry Bluck, Samuel D. Harkness, IV, Tom Nolan
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Patent number: 11694913Abstract: A processing system is provided, including a vacuum enclosure having a plurality of process windows and a continuous track positioned therein; a plurality of processing chambers attached sidewalls of the vacuum enclosures, each processing chamber about one of the process windows; a loadlock attached at one end of the vacuum enclosure and having a loading track positioned therein; at least one gate valve separating the loadlock from the vacuum enclosure; a plurality of substrate carriers configured to travel on the continuous track and the loading track; at least one track exchanger positioned within the vacuum enclosure, the track exchangers movable between a first position, wherein substrate carriers are made to continuously move on the continuous track, and a second position wherein the substrate carriers are made to transfer between the continuous track and the loading track.Type: GrantFiled: December 16, 2019Date of Patent: July 4, 2023Assignee: INTEVAC, INC.Inventor: Terry Bluck
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Publication number: 20230176259Abstract: A protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an antireflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.Type: ApplicationFiled: December 7, 2022Publication date: June 8, 2023Inventors: Samuel D. Harkness, IV, Tom Nolan, Jae Ha Choi, Alexander Vassilievich Demtchouk, Terry Bluck
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Publication number: 20230176256Abstract: A system and method for fabricating protective coating for transparent panels, especially beneficial for transparent panels covering digital displays. The protective coating includes an adhesion layer formed on a surface of the transparent panel, a stress grading intermediate layer formed over the adhesion layer, a protective layer formed over the stress grading intermediate layer, and an anti-reflective layer formed over the protective layer. Also provided is a sputtering system for fabricating the protective coating.Type: ApplicationFiled: December 7, 2022Publication date: June 8, 2023Inventors: Samuel D. Harkness, IV, Tom Nolan, Jae Ha Choi, Alexander Vassilievich Demtchouk, Terry Bluck
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Patent number: 11414748Abstract: A processing system is provided, including a vacuum enclosure having a plurality of process windows and a continuous track positioned therein; a plurality of processing chambers attached sidewalls of the vacuum enclosures, each processing chamber about one of the process windows; a loadlock attached at one end of the vacuum enclosure and having a loading track positioned therein; at least one gate valve separating the loadlock from the vacuum enclosure; a plurality of substrate carriers configured to travel on the continuous track and the loading track; at least one track exchanger positioned within the vacuum enclosure, the track exchangers movable between a first position, wherein substrate carriers are made to continuously move on the continuous track, and a second position wherein the substrate carriers are made to transfer between the continuous track and the loading track.Type: GrantFiled: September 25, 2019Date of Patent: August 16, 2022Assignee: INTEVAC, INC.Inventor: Terry Bluck
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Publication number: 20220185726Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing sectionType: ApplicationFiled: January 31, 2022Publication date: June 16, 2022Inventors: Terry Bluck, Wendell Thomas Blonigan
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Patent number: 11255013Abstract: The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low E enhancement, and other similar materials. In further aspects, ion implantation is used to create other desirable film properties such anti-microbial and corrosion resistance.Type: GrantFiled: September 29, 2017Date of Patent: February 22, 2022Assignee: INTEVAC, INC.Inventors: Terry Bluck, Babak Adibi
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Patent number: 11236013Abstract: A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing sectionType: GrantFiled: July 19, 2018Date of Patent: February 1, 2022Assignee: INTEVAC, INC.Inventors: Terry Bluck, Wendell Thomas Blonigan
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Patent number: 11187834Abstract: A multi-color dielectric coating is formed using interleaved layers of dielectric material, having alternating refractive index, to create reflections at selected wavelengths, thus appearing as different colors. Etching of selected layers at selected locations changes the color appearance of the etched locations, thus generating a coating having multiple colors. The thicknesses of the layers are chosen such that the path-length differences for reflections from different high-index layers are integer multiples of the wavelength for which the coating is designed.Type: GrantFiled: February 20, 2019Date of Patent: November 30, 2021Assignee: INTEVAC, INC.Inventors: Terry Bluck, Paul Ramon Markoff Johnson, Alexander Vassilievich Demchuk
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Publication number: 20210355579Abstract: A method for forming thin film layer having micro-voids therein. The method proceeds by dispersing micro-particles over the surface of a substrate. The micro particles are made of sublimable material. Then the thin film layer is formed over the surface, so as to cover the particles. The thin film is then etched back so as to expose the particles at least partially. The material of the particles is then sublimed, e.g., by heating the substrate, thereby leaving micro-voids inside the thin film layer. The micro voids can be filled or remain exposed to generate textured surface.Type: ApplicationFiled: May 3, 2021Publication date: November 18, 2021Inventors: Terry Bluck, Samuel D. Harkness, IV
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Publication number: 20210087674Abstract: A processing system is provided, including a vacuum enclosure having a plurality of process windows and a continuous track positioned therein; a plurality of processing chambers attached sidewalls of the vacuum enclosures, each processing chamber about one of the process windows; a loadlock attached at one end of the vacuum enclosure and having a loading track positioned therein; at least one gate valve separating the loadlock from the vacuum enclosure; a plurality of substrate carriers configured to travel on the continuous track and the loading track; at least one track exchanger positioned within the vacuum enclosure, the track exchangers movable between a first position, wherein substrate carriers are made to continuously move on the continuous track, and a second position wherein the substrate carriers are made to transfer between the continuous track and the loading track.Type: ApplicationFiled: September 25, 2019Publication date: March 25, 2021Inventor: Terry Bluck
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Patent number: 10955589Abstract: An optical coating, such as anti-reflective coating (ARC) or colored coating for optical devices, suitable especially for mobile devices. The ARC is made up of alternating layers of low refractive index and high refractive index. At least one of the layers, preferably the top layer, is made up of nano-laminate. The nano-laminate is a structure of alternating nano-layers, each nano-layer made out of a material having refractive index similar to the layer it replaces. Optionally, each of the layers are made up of nano-laminates, such that a layer having low refractive index is made up of nano-laminates of nano-layers having low refractive index, while high index layers are made up of nano-lamonate of nano-layers having high refractive index. Each of the nano-layers is of 2-10 nanometer thickness.Type: GrantFiled: June 1, 2018Date of Patent: March 23, 2021Assignee: INTEVAC, INC.Inventors: Terry Bluck, Gaurav Saraf, James Craig Hunter, Changwan Hwang, Paul R. Markoff Johnson, Jae Ha Choi
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Patent number: 10854772Abstract: A system for transporting substrates and precisely align the substrates horizontally and vertically. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of chuck assemblies are loosely positioned, each of the chuck assemblies includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. A pedestal is configured to freely slide on the base. The pedestal includes a set of horizontal alignment wheels that precisely align the pedestal in the horizontal direction. An electrostatic chuck is magnetically held to the pedestal.Type: GrantFiled: July 19, 2018Date of Patent: December 1, 2020Assignee: INTEVAC, INC.Inventors: Hoang Huy Vu, Babak Adibi, Terry Bluck
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Publication number: 20200350188Abstract: A substrate processing system, including a processing module having at least one sputtering source; a first buffer module positioned on a first side of the processing module; a second buffer module positioned on a second side of the processing module directly opposite the first side; a first cooling module attached to the first buffer module; a second cooling module attached to the second buffer module; a transport system transporting substrate carriers in a straight line through the first cooling module, the first buffer module, the processing module, the second buffer module and the second cooling module; wherein the system is arranged linearly in the order: first cooling module, the first buffer module, the processing module, the second buffer module and the second cooling module.Type: ApplicationFiled: April 29, 2020Publication date: November 5, 2020Inventors: Terry Bluck, Arun Karamcheti
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Patent number: 10752987Abstract: Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.Type: GrantFiled: February 19, 2018Date of Patent: August 25, 2020Assignee: INTEVAC, INC.Inventors: Patrick Leahey, Eric Lawson, Charles Liu, Terry Bluck, Kevin P. Fairbairn, Robert L. Ruck, Samuel D. Harkness, IV
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Publication number: 20200194289Abstract: A processing system is provided, including a vacuum enclosure having a plurality of process windows and a continuous track positioned therein; a plurality of processing chambers attached sidewalls of the vacuum enclosures, each processing chamber about one of the process windows; a loadlock attached at one end of the vacuum enclosure and having a loading track positioned therein; at least one gate valve separating the loadlock from the vacuum enclosure; a plurality of substrate carriers configured to travel on the continuous track and the loading track; at least one track exchanger positioned within the vacuum enclosure, the track exchangers movable between a first position, wherein substrate carriers are made to continuously move on the continuous track, and a second position wherein the substrate carriers are made to transfer between the continuous track and the loading track.Type: ApplicationFiled: December 16, 2019Publication date: June 18, 2020Inventor: Terry Bluck
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Patent number: 10679883Abstract: A system for processing wafers in a vacuum processing chamber. Carrier comprising a frame having a plurality of openings, each opening configured to accommodate one wafer. A transport mechanism configured to transport the plurality of carriers throughout the system. A plurality of wafer plates configured for supporting wafers. An attachment mechanism for attaching a plurality of wafer plates to each of the carriers, wherein each of the wafer plates is attached to a corresponding position at an underside of a corresponding carrier, such that each of the wafers positioned on one of the wafer carriers is positioned within one of the plurality of opening in the carrier. Mask attached over front side of one of the plurality of opening in the carrier. Alignment stage supports wafer plate under the opening in the carrier. A camera positioned to simultaneously image the mask and the wafer.Type: GrantFiled: October 3, 2016Date of Patent: June 9, 2020Assignee: INTEVAC, INC.Inventors: Terry Bluck, Aaron Zanetto, William Eugene Runstadler, Jr., Terry Pederson
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Patent number: 10559710Abstract: A system for transporting substrates and precisely alignment the substrates to shadow masks. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of pedestals are loosely positioned, each of the pedestals includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. Two sidebars are configured to freely slide on the base. Each of the sidebars includes a set of horizontal alignment wheels that precisely align the substrate in the horizontal direction. Substrate support claws are attached to the sidebars in precise alignment to the vertical alignment wheels and the horizontal alignment wheels.Type: GrantFiled: July 19, 2018Date of Patent: February 11, 2020Assignee: INTEVAC, INC.Inventors: William Eugene Runstadler, Jr., Babak Adibi, Terry Bluck