Abstract: Method and apparatus for generating and delivering a gas that contains vapor produced by subliming a solid for use in chemical vapor deposition processes such as Metal Organic Molecular Beam Epitaxy (MOMBE) and Organometallic Vapor Phase Epitaxy (OMVPE). The method includes generating a gas saturated with the vapor and subsequently diluting the gas with an inert gas to obtain an uniform non-saturated gas. The apparatus includes a vessel for containing a sublimable solid, a heater for maintaining the vessel at a desired temperature, tubes and valves for introducing a gas into the vessel and for discharging a gas that is saturated with the vapor of the solid from the vessel, and a tube and a valve for diluting a gas discharged from the vessel.

Abstract: Method for forming metal alkyl compounds by the direct combination of metal halide, lithium metal, and alkyl or aryl halide and for purifying metal alkyl compounds by repeated sublimation/pumping cycles. The method can be used to produce metal alkyl compounds which are substantially free of volatile impurities.