Patents by Inventor Terry Phelan

Terry Phelan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of treating deposition process components to form particle traps, and deposition process components having particle traps thereon
    Publication number: 20070056688
    Abstract: The invention includes methods for forming particle traps along surfaces of PVD components, and comprises PVD components having particle traps thereon. The invention can include utilization of highly soluble media for bead-blasting and/or can include utilization of metallic materials as bead-blasting media. The invention can also include formation of an insert along regions of a backing plate where particle traps are desired, with the insert being of a composition which has better particle-trapping properties than the backing plate.
    Type: Application
    Filed: September 10, 2004
    Publication date: March 15, 2007
    Inventors: Jaeyeon Kim, Terry Phelan, Janine Kardokus, Scott Sayles