Abstract: A laser processing apparatus includes: a stage 2 capable of levitating and transporting a substrate 3 by jetting gas from a front surface; a laser oscillator configured to irradiate a laser beam 20a onto the substrate 3; and a gas jetting port arranged at a position overlapping a focus point position of the laser beam 20a in plan view, and being configured to jet inert gas. The front surface of the stage 2 is constituted by upper structures 5a and 5b, and the upper structures 5a and 5b are arranged so as to be spaced apart from each other and face each other. A gap between the upper structures 5a and 5b overlaps the focus point position of the laser beam 20a in plan view. A filling member 8 is arranged between the upper structures 5a and 5b so as to fill the gap between the upper structures 5a and 5b.

Abstract: A lens barrel for holding a lens includes a barrel body for containing the lens. A ring shaped receiving wall is formed on the barrel body, for receiving a rear face of a peripheral portion of the lens, to position the lens in an optical axis direction. Three retaining claw portions are disposed to project from the barrel body, for retaining the lens on the ring shaped receiving wall by engagement with the peripheral portion thereof. Three first through holes are formed in the barrel body, and adapted to insertion and pressure of an external adjusting rod for positioning adjustment of the lens. Second through holes are formed in the barrel body, and adapted to introduction of adhesive agent for attaching the lens on the barrel body. The retaining claw portions and the first through holes are arranged at a regular pitch on a circumference of the barrel body.

Abstract: A first fixing plate 51, which is bonded to a G light prism 29 and which holds a G light DMD unit 50, is formed of a metal plate having a liner coefficient of expansion, which is substantially the same as that of the G light prism 29. The G light DMD unit 50 is fixed by inserting holding projections 51b into through holes 64 and inserting fixing holes 52a of a second fixing plate 52 into the holding projections 51b protruding through the through holes 64. The fixing holes 52a of the second fixing plate 52 have a shape similar to a section shape of the holding projections 51b taken along a plane perpendicular to the insertion direction. A gap between each holding projection 51b and the corresponding fixing hole 52a is uniform in an overall circumference. A thickness of the adhesive filled in this gap is uniform.

Abstract: A lens barrel for holding a lens includes a barrel body for containing the lens. A ring shaped receiving wall is formed on the barrel body, for receiving a rear face of a peripheral portion of the lens, to position the lens in an optical axis direction. Three retaining claw portions are disposed to project from the barrel body, for retaining the lens on the ring shaped receiving wall by engagement with the peripheral portion thereof. Three first through holes are formed in the barrel body, and adapted to insertion and pressure of an external adjusting rod for positioning adjustment of the lens. Second through holes are formed in the barrel body, and adapted to introduction of adhesive agent for attaching the lens on the barrel body. The retaining claw portions and the first through holes are arranged at a regular pitch on a circumference of the barrel body.

Abstract: To the female helicoidal screw of the lens barrel (outer barrel body), there is always imparted a biasing force from a plurality of looseness eliminating springs formed on the outside peripheral portion of the lens barrel (inner barrel body) which are integrally supported on the lens barrel (inner barrel body), by means of the male helicoidal screw, and the male helicoidal screw is slid while being thrusted against the female helicoidal screw.

Abstract: To the female helicoidal screw of the lens barrel (outer barrel body), there is always imparted a biasing force from a plurality of looseness eliminating springs formed on the outside peripheral portion of the lens barrel (inner barrel body) which are integrally supported on the lens barrel (inner barrel body), by means of the male helicoidal screw, and the male helicoidal screw is slid while being thrusted against the female helicoidal screw.