Abstract: Methods and apparatus for plasma processing are provided herein. For example, apparatus can include a system for plasma processing including a remote plasma source including a supply terminal configured to connect to a power source and an output configured to deliver RF power to a plasma block of the remote plasma source for creating a plasma and a controller configured to control operation of the remote plasma source based on a measured input power at the supply terminal.

Abstract: A plasma ignition circuit includes a transformer having a primary coil configured to couple an RF power supply. A first secondary coil is configured to couple a remote plasma source (RPS), and a second secondary coil. The plasma ignition circuit further includes a control switch having an input configured to couple the second secondary coil and an output configured to capacitively couple the RPS and a switch controller. The switch controller is configured to upon sensing a secondary RF voltage applied to the second secondary coil in response to an RF voltage applied by RF power supply to the primary coil, enable the control switch to capacitively apply the secondary RF voltage to the RPS to ignite a plasma within the RPS. Upon sensing a drop in plasma impedance when the plasma is ignited, disable the control switch to discontinue applying the secondary RF voltage to the RPS.

Abstract: Methods and apparatus for plasma processing are provided herein. For example, apparatus can include a system for plasma processing including a remote plasma source including a supply terminal configured to connect to a power source and an output configured to deliver RF power to a plasma block of the remote plasma source for creating a plasma and a controller configured to control operation of the remote plasma source based on a measured input power at the supply terminal.

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, apparatus can include a system for processing a substrate, comprising: a remote plasma source including a supply terminal configured to connect to a power source and an output configured to deliver RF power to a plasma block of the remote plasma source for creating a plasma; and a controller connected to the supply terminal of the remote plasma source and configured to determine, based on a predictive model of the remote plasma source, whether a power at the supply terminal is equal to a predetermined threshold during processing of a substrate, wherein the predictive model includes a correlation of remote plasma performance with delivered RF power at the output, and to control the processing of the substrate based on a determination of the predetermined threshold being met to control processing of the substrate.

Abstract: A plasma ignition circuit includes a transformer having a primary coil configured to couple an RF power supply. A first secondary coil is configured to couple a remote plasma source (RPS), and a second secondary coil. The plasma ignition circuit further includes a control switch having an input configured to couple the second secondary coil and an output configured to capacitively couple the RPS and a switch controller. The switch controller is configured to upon sensing a secondary RF voltage applied to the second secondary coil in response to an RF voltage applied by RF power supply to the primary coil, enable the control switch to capacitively apply the secondary RF voltage to the RPS to ignite a plasma within the RPS. Upon sensing a drop in plasma impedance when the plasma is ignited, disable the control switch to discontinue applying the secondary RF voltage to the RPS.

Abstract: An electronic tracked and ranging system is disclosed. Electronic tracked and ranging system applies interferometer principles to determine ranging distance from a monitor unit 10 to a tracked unit 12. In particular, the system transmits a monitor direct sequence spread spectrum (MDSSS) 52 from a monitor unit 10 to a tracked unit 12. Afterwards, tracked unit 12 transmits a tracked direct sequence spread spectrum (TDSSS) 56. Finally, monitor unit 10 receives TDSSS 56, performs a comparison to a reference MDSSS 52 locks signals between MDSSS 52 and TDSSS 56 and outputs distance between monitor unit 10 and tracked unit 12 using several phase comparisons. Multiple frequencies within MDSSS 52 are phase detected so as to increase accuracy of monitor unit 10 ranging distance to tracked unit 12.

Abstract: An electrical switching circuit for controlling current flow to an electrical load from a primary power source with a first electrical potential difference relative to a circuit ground comprising a primary energy storage device with a low side coupled to the electrical load, a secondary electrical energy storage device with a high side and a low side, a controllable electrical switch that toggles the low side of the secondary energy storage device from the circuit ground to the low side of the primary energy storage device, a primary unidirectional current gate coupled between the high side of the secondary energy storage device and the high side of the primary energy storage device to let current flow from the secondary energy storage device to the primary energy storage device when the potential difference of the high side of the secondary energy storage device is higher than the high side of the primary energy storage device, a secondary unidirectional current gate coupled between a secondary power source

Abstract: An electrical switching circuit for controlling current flow to an electrical load from a primary power source with a first electrical potential difference relative to a circuit ground comprises: a primary electrical switch coupled between the primary power source and the electrical load with a control input that is responsive to a control signal of predetermined potential difference relative to the electrical load; a primary energy storage device with a low side coupled to the electrical load; a primary switch controller coupled to the primary energy storage unit with a controller output coupled to the primary switch control input that develops a controller output signal that approximates the potential difference across the primary energy storage unit in response to a controller input signal; a secondary electrical energy storage device with a high side and a low side; a controllable electrical switch that toggles the low side of the secondary energy storage device from the circuit ground to the low side of

Abstract: An electronic tracked and ranging system is disclosed. Electronic tracked and ranging system applies interferometer principles to determine ranging distance from a monitor unit 10 to a tracked unit 12. In particular, the system transmits a monitor direct sequence spread spectrum (MDSSS) 52 from a monitor unit 10 to a tracked unit 12. Afterwards, tracked unit 12 transmits a tracked direct sequence spread spectrum (TDSSS) 56. Finally, monitor unit 10 receives TDSSS 56, performs a comparison to a reference MDSSS 52 locks signals between MDSSS 52 and TDSSS 56 and outputs distance between monitor unit 10 and tracked unit 12 using several phase comparisons. Multiple frequencies within MDSSS 52 are phase detected so as to increase accuracy of monitor unit 10 ranging distance to tracked unit 12.

Abstract: An electronic tracked and ranging system is disclosed. Electronic tracking and ranging system applies interferometer principles to determine ranging distance from a monitor unit 10 to a tracked unit 12. In particular, the system transmits a monitor direct sequence spread spectrum (MDSSS) 52 signal from a monitor unit 10 to a tracked unit 12. Afterwards, tracked unit 12 transmits a tracked direct sequence spread spectrum (TDSSS) 56 signal. Finally, monitor unit 10 receives TDSSS 56, performs a comparison to a reference MDSSS signal 52 locks between MDSSS signal 52 and TDSSS signal 56 and outputs distance between monitor unit 10 and tracked unit 12 using several phase comparisons. Multiple frequencies within MDSSS signal 52 are phase detected so as to increase accuracy of monitor unit 10 ranging distance to tracked unit 12.

Abstract: An electronic tracked and ranging system is disclosed. Electronic tracking and ranging system applies interferometer principles to determine ranging distance from a monitor unit 10 to a tracked unit 12. In particular, the system transmits a monitor direct sequence spread spectrum (MDSSS) 52 signal from a monitor unit 10 to a tracked unit 12. Afterwards, tracked unit 12 transmits a tracked direct sequence spread spectrum (TDSSS) 56 signal. Finally, monitor unit 10 receives TDSSS 56, performs a comparison to a reference MDSSS signal 52 locks between MDSSS signal 52 and TDSSS signal 56 and outputs distance between monitor unit 10 and tracked unit 12 using several phase comparisons. Multiple frequencies within MDSSS signal 52 are phase detected so as to increase accuracy of monitor unit 10 ranging distance to tracked unit 12.