Abstract: An apparatus for disintegrating lumps of boiled rice while cooling and freezing, comprising a cooling chamber and a freezing chamber through which boiled rice is caused to pass being carried on a mesh conveyor and thereby being cooled and frozen to a temperature from +10.degree. C. to -30.degree. C., and one or plurality of disintegrators disposed above and across the belt conveyor each comprising a rotary comb and a stationary comb both having a plurality of comb teeth disposed such that the teeth of the opposing combs are meshed with each other. In a preferred embodiment, the stationary comb of the disintegrator at the downstream of the mesh belt conveyor is disposed spaced apart from the belt conveyor by such a gap between the lower end of the comb teeth and the upper surface of the belt conveyor as allowing to pass only the individually disintegrated rice grains to pass therethrough.

Abstract: A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with air in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere.An inert gas mixing pipe is connected for dilution to an exhaust gas feed section, an enclosure pipe is fitted to the outer circumference of an exhaust gas introduction pipe introduced into the combustion chamber to constitute a double pipe structure, and the enclosure pipe is connected at the rear end thereof to an inert gas feed pipe and slightly protuded at the top end thereof ahead of the top end for the exhaust gas introduction pipe.