Patents by Inventor Tetsuo Kawakatsu

Tetsuo Kawakatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultrasonic vibrator, ultrasonic cleaning nozzle, ultrasonic cleaning device, substrate cleaning device, substrate cleaning treatment system and ultrasonic cleaning nozzle manufacturing method
    Patent number: 5927306
    Abstract: An ultrasonic cleaning nozzle comprises an ultrasonic vibrator, a case body and a nozzle cap. A chemical liquid supplied from a supply port is irradiated with ultrasonic waves by the ultrasonic vibrator, and thereafter sprayed from a spray port. The ultrasonic waves linearly advance in the chemical liquid, strike an inner wall of the nozzle cap, reflect and thereafter spray from the spray port with the chemical liquid. An ultrasonic wave irradiation surface of the ultrasonic vibrator and the inner wall of the nozzle cap are coated with high-purity SiC. The parts of the nozzle which are in contact with the chemical liquid and are struck by the ultrasonic waves have resistance against the ultrasonic waves and are corrosion resistant against the chemical liquid.
    Type: Grant
    Filed: November 18, 1997
    Date of Patent: July 27, 1999
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Akira Izumi, Tetsuo Kawakatsu