Patents by Inventor Tetsuo Shibutami

Tetsuo Shibutami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11168393
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: November 9, 2021
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami
  • Patent number: 10366870
    Abstract: Provided is a cylindrical ceramic sputtering target, which significantly reduces the occurrence of a crack, a chip, extraordinary discharge and a nodule. By filling a molten bonding material in a cavity defined by a cylindrical ceramic target material and a cylindrical base material, starting cooling the molten bonding material from its one end toward its other end in a cylindrical axial direction in sequence, and further filling the molten bonding material in the cavity during cooling, a cylindrical ceramic sputtering target is manufactured so as to be characterized in that as observed by an X-ray radiograph of the bonding material, the total area of portions where no bonding material exists is 10 cm2 or less per 50 cm2 of X-ray radiograph area, and the maximum area of the portions where no bonding material exists is 9 cm2 or less.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: July 30, 2019
    Assignee: TOSOH CORPORATION
    Inventors: Shigehisa Todoko, Kimiaki Tamano, Kenichi Itoh, Tetsuo Shibutami
  • Publication number: 20190106784
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Application
    Filed: November 30, 2018
    Publication date: April 11, 2019
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Keitaro MATSUMARU, Koyata TAKAHASHI, Ryou KIKUCHI, Tetsuo SHIBUTAMI
  • Patent number: 10174419
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: January 8, 2019
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami
  • Patent number: 9920420
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: March 20, 2018
    Assignee: TOSOH CORPORATION
    Inventors: Kenichi Itoh, Masami Mesuda, Hitoshi Nagayama, Tetsuo Shibutami, Shunsuke Yatsunami
  • Patent number: 9418771
    Abstract: The present invention provides a complex oxide sintered body 10 wherein Zr/(In+Zr+Y) is 0.05 to 4.5 at % and Y/(In+Zr+Y) is 0.005 to 0.5 at % in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered body 10 and a transparent conductive oxide film obtained by sputtering the sputtering target.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: August 16, 2016
    Assignee: TOSOH CORPORATION
    Inventors: Hideto Kuramochi, Kimiaki Tamano, Hitoshi Iigusa, Ryo Akiike, Tetsuo Shibutami
  • Patent number: 9399815
    Abstract: The invention provides an oxide sintered compact 2 composed of a crystal phase which consists of a bixbite-type oxide phase and a perovskite-type oxide phase, or a bixbite-type oxide phase, the crystal phase having indium, tin, strontium and oxygen as the constituent elements, and the indium, the tin and the strontium contents satisfying formulas (1) and (2) in terms of atomic ratio, as well as a sputtering target. There are further provided an oxide transparent conductive film formed using the sputtering target, and a solar cell. Sn/(In+Sn+Sr)=0.01-0.11??(1) Sr/(In+Sn+Sr)=0.0005-0.004??(2) [In formulas (1) and (2), In, Sn and Sr represent indium, tin and strontium contents (atomic percent), respectively.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: July 26, 2016
    Assignee: TOSOH CORPORATION
    Inventors: Hideto Kuramochi, Keitaro Matsumaru, Ryo Akiike, Kentaro Utsumi, Tetsuo Shibutami
  • Patent number: 9396830
    Abstract: There is provided a zinc oxide sintered compact with a zirconium content of 10 to 1000 ppm, and a sputtering target containing the zinc oxide sintered compact. There is also provided a zinc oxide thin-film having a zirconium content of 10 to 2000 ppm and a resistivity of 10 ?·cm or greater.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: July 19, 2016
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi, Hitoshi Iigusa, Kenji Omi, Tetsuo Shibutami
  • Publication number: 20160141159
    Abstract: Provided is a cylindrical ceramic sputtering target, which significantly reduces the occurrence of a crack, a chip, extraordinary discharge and a nodule. By filling a molten bonding material in a cavity defined by a cylindrical ceramic target material and a cylindrical base material, starting cooling the molten bonding material from its one end toward its other end in a cylindrical axial direction in sequence, and further filling the molten bonding material in the cavity during cooling, a cylindrical ceramic sputtering target is manufactured so as to be characterized in that as observed by an X-ray radiograph of the bonding material, the total area of portions where no bonding material exists is 10 cm2 or less per 50 cm2 of X-ray radiograph area, and the maximum area of the portions where no bonding material exists is 9 cm2 or less.
    Type: Application
    Filed: December 28, 2015
    Publication date: May 19, 2016
    Applicant: TOSOH CORPORATION
    Inventors: Shigehisa TODOKO, Kimiaki TAMANO, Kenichi ITOH, Tetsuo SHIBUTAMI
  • Publication number: 20150368791
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Application
    Filed: July 21, 2015
    Publication date: December 24, 2015
    Applicant: TOSOH CORPORATION
    Inventors: Kenichi ITOH, Masami MESUDA, Hitoshi NAGAYAMA, Tetsuo SHIBUTAMI, Shunsuke YATSUNAMI
  • Patent number: 9127352
    Abstract: Provided is a cylindrical sputtering target which attains a high production yield in a film-forming process even when a film is formed by sputtering with a long cylindrical sputtering target constituted by a plurality of cylindrical target materials. A multi-divided cylindrical sputtering target formed by bonding a cylindrical base and a plurality of cylindrical target materials together with a bonding material has a divided portion where adjacent cylindrical target materials are arranged with a gap therebetween, while outer peripheral faces of the adjacent cylindrical target materials have a step of 0.5 mm or less therebetween in the divided portion. Such a target is obtained by fixing the cylindrical target materials with reference to the outer peripheral faces of the cylindrical target materials when arranging the cylindrical target materials with reference to the cylindrical base.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: September 8, 2015
    Assignee: TOSOH CORPORATION
    Inventors: Kenichi Itoh, Kimiaki Tamano, Shigehisa Todoko, Tetsuo Shibutami
  • Patent number: 9111663
    Abstract: A sintered composite oxide 2 composed mainly of zinc, aluminum, titanium and oxygen, the atomic ratio of the elements satisfying the following equations (1) to (3), the sintered composite oxide 2 comprising particles having a hexagonal wurtzite structure containing zinc oxide as the major component and having a mean particle size of no greater than 20 ?m, and particles having a ZnTiO3-like structure and/or Zn2Ti3O8-like structure containing aluminum and titanium and having a mean particle size of no greater than 5 ?m, and containing no particles with a spinel oxide structure of zinc aluminate with zinc and aluminum in solid solution, and a manufacturing method for the same. (Al+Ti)/(Zn+Al+Ti)=0.004-0.055??(1) Al/(Zn+Al+Ti)=0.002-0.025??(2) Ti/(Zn+Al+Ti)=0.002-0.048??(3) [In the equations, Al, Ti and Zn represent the contents (atomic percents) of aluminum, titanium and zinc, respectively.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: August 18, 2015
    Assignee: TOSOH CORPORATION
    Inventors: Hideto Kuramochi, Hitoshi Iigusa, Tetsuo Shibutami
  • Publication number: 20140332735
    Abstract: The present invention provides a complex oxide sintered body 10 wherein Zr/(In+Zr+Y) is 0.05 to 4.5 at % and Y/(In+Zr+Y) is 0.005 to 0.5 at % in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered body 10 and a transparent conductive oxide film obtained by sputtering the sputtering target.
    Type: Application
    Filed: November 29, 2012
    Publication date: November 13, 2014
    Inventors: Hideto Kuramochi, Kimiaki Tamano, Hitoshi Ilgusa, Ryo Akiike, Tetsuo Shibutami
  • Patent number: 8828198
    Abstract: To provide a cylindrical sputtering target, whereby cracking during sputtering can be remarkably reduced. A cylindrical sputtering target, wherein a cylindrical target material made of ITO or AZO has a relative density of at least 90%; the angle between the grinding direction on its outer circumferential surface and a straight line parallel with its cylindrical axis (out of such angles, ? represents an angle between 0° and 90°) satisfies 45°<??90° or tan ?>?R/L (where R is an outside diameter of the cylindrical target material, and L is the length of the cylindrical target material); and the surface roughness Ra of the outer circumferential surface of the cylindrical target material is at most 3 ?m.
    Type: Grant
    Filed: July 1, 2008
    Date of Patent: September 9, 2014
    Assignee: Tosoh Corporation
    Inventors: Shigehisa Todoko, Kenichi Itoh, Tetsuo Shibutami
  • Publication number: 20130276879
    Abstract: The invention provides an oxide sintered compact 2 composed of a crystal phase which consists of a bixbite-type oxide phase and a perovskite-type oxide phase, or a bixbite-type oxide phase, the crystal phase having indium, tin, strontium and oxygen as the constituent elements, and the indium, the tin and the strontium contents satisfying formulas (1) and (2) in terms of atomic ratio, as well as a sputtering target. There are further provided an oxide transparent conductive film formed using the sputtering target, and a solar cell. Sn/(In+Sn+Sr)=0.01-0.11??(1) Sr/(In+Sn+Sr)=0.0005-0.004??(2) [In formulas (1) and (2), In, Sn and Sr represent indium, tin and strontium contents (atomic percent), respectively.
    Type: Application
    Filed: September 27, 2011
    Publication date: October 24, 2013
    Applicant: TOSOH CORPORATION
    Inventors: Hideto Kuramochi, Keitaro Matsumaru, Ryo Akiike, Kentaro Utsumi, Tetsuo Shibutami
  • Publication number: 20130273346
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Application
    Filed: December 20, 2011
    Publication date: October 17, 2013
    Applicant: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami
  • Publication number: 20130213801
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Application
    Filed: March 18, 2013
    Publication date: August 22, 2013
    Inventors: Kenichi ITOH, Masami MESUDA, Hitoshi NAGAYAMA, Tetsuo SHIBUTAMI, Shunsuke YATSUNAMI
  • Publication number: 20130214215
    Abstract: There is provided a zinc oxide sintered compact with a zirconium content of 10 to 1000 ppm, and a sputtering target containing the zinc oxide sintered compact. There is also provided a zinc oxide thin-film having a zirconium content of 10 to 2000 ppm and a resistivity of 10 ?·cm or greater.
    Type: Application
    Filed: November 25, 2011
    Publication date: August 22, 2013
    Applicant: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi, Hitoshi Iigusa, Kenji Omi, Tetsuo Shibutami
  • Publication number: 20130181173
    Abstract: A sintered composite oxide 2 composed mainly of zinc, aluminum, titanium and oxygen, the atomic ratio of the elements satisfying the following equations (1) to (3), the sintered composite oxide 2 comprising particles having a hexagonal wurtzite structure containing zinc oxide as the major component and having a mean particle size of no greater than 20 ?m, and particles having a ZnTiO3-like structure and/or Zn2Ti3O8-like structure containing aluminum and titanium and having a mean particle size of no greater than 5 ?m, and containing no particles with a spinel oxide structure of zinc aluminate with zinc and aluminum in solid solution, and a manufacturing method for the same. (Al+Ti)/(Zn+Al+Ti)=0.004-0.055??(1) Al/(Zn+Al+Ti)=0.002-0.025??(2) Ti/(Zn+Al+Ti)=0.002-0.048??(3) [In the equations, Al, Ti and Zn represent the contents (atomic percents) of aluminum, titanium and zinc, respectively.
    Type: Application
    Filed: September 27, 2011
    Publication date: July 18, 2013
    Applicant: TOSOH CORPORATION
    Inventors: Hideto Kuramochi, Hitoshi Iigusa, Tetsuo Shibutami
  • Patent number: 8419400
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Grant
    Filed: January 27, 2006
    Date of Patent: April 16, 2013
    Assignee: Tosoh Corporation
    Inventors: Kenichi Itoh, Masami Mesuda, Hitoshi Nagayama, Tetsuo Shibutami, Shunsuke Yatsunami