Patents by Inventor Tetsuo Yuasa

Tetsuo Yuasa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam exposure method
    Patent number: 4151422
    Abstract: An electron beam having a narrow rectangular cross section, shaped by two aperture plates and a deflector, is scanned over a workpiece or specimen. The length and width of the narrow rectangular cross section, relative to beam scanning, in accordance with the shape of the pattern being exposed.
    Type: Grant
    Filed: June 7, 1978
    Date of Patent: April 24, 1979
    Assignees: Rikagaku Kenkyusho, Nihon Denshi Kabushiki Kaisha
    Inventors: Eiichi Goto, Takashi Souma, Masanori Idesawa, Tetsuo Yuasa