Abstract: A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.

Abstract: A method includes an electrostatic capacitance detecting step of detecting electrostatic capacitances of opposing parts of a moving body side electrode and an oscillating plate electrode; an electrostatic capacitance storing step of storing the electrostatic capacitances at the first movement limit position and the second movement limit position detected at the electrostatic capacitance detecting step; a ratio calculating step of calculating a ratio of the electrostatic capacitances at the first movement limit position and the second movement limit position stored at the electrostatic capacitance storing step to a movement limit distance that is a distance between the first movement limit position and the second movement limit position; and an absolute position calculating step of calculating an absolute position of the moving body between the first movement limit position and the second movement limit position from the ratio.

Abstract: An inertial drive actuator includes a fixed member, a displacement generating mechanism of which, one end is adjacent to the fixed member, and a displacement is generated at the other end thereof, a driving mechanism which applies a voltage for displacing the displacement generating mechanism, a vibration substrate which is connected to the other end of the displacement generating mechanism, and which is displaceable in a direction of displacement, a mobile object which is disposed to be facing a vibration substrate electrode provided to the vibration substrate, and which moves with respect to the vibration substrate by an inertia, and a friction controlling mechanism which changes a frictional force between the mobile object and the vibration substrate.

Abstract: A calibration method for inertial drive actuator of driving a target moving body among a plurality of moving bodies to move by inertia between a first movement limit position and a second movement limit position in relation to an oscillating plate that is moved to reciprocate by a moving member, and detecting positions of the moving bodies based on electrostatic capacitances includes detecting electrostatic capacitances of opposing parts of a moving body side electrode provided in a target moving body and an oscillating plate electrode provided in the oscillating plate is detected at the first movement limit position and the second movement limit position, respectively; and calculating a ratio of a difference between the electrostatic capacitances at the first movement limit position and the second movement limit position to a movement limit distance that is a distance between the first movement limit position and the second movement limit position.

Abstract: There is provided an inertial drive actuator in which, a small-sizing is easy, including a first displacement generating mechanism of which, one end is adjacent to a fixed member, and a first displacement is generated in the other end thereof, a second displacement generating mechanism of which, one end is adjacent to the fixed member, and which generates a second displacement in the other end thereof, a driving mechanism which applies a voltage for displacing the first displacement generating mechanism and the second displacement generating mechanism, a vibration substrate which is connected to the other end of the first displacement generating mechanism and the other end of the second displacement generating mechanism, and which is displaceable in a plane in which, there exist a direction of the first displacement and a direction of the second displacement, a mobile object which is disposed to be facing the vibration substrate, and which moves with respect to the vibration substrate by an inertia with respe

Abstract: A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.

Abstract: A calibration method for inertial drive actuator of driving a target moving body among a plurality of moving bodies to move by inertia between a first movement limit position and a second movement limit position in relation to an oscillating plate that is moved to reciprocate by a moving member, and detecting positions of the moving bodies based on electrostatic capacitances includes detecting electrostatic capacitances of opposing parts of a moving body side electrode provided in a target moving body and an oscillating plate electrode provided in the oscillating plate is detected at the first movement limit position and the second movement limit position, respectively; and calculating a ratio of a difference between the electrostatic capacitances at the first movement limit position and the second movement limit position to a movement limit distance that is a distance between the first movement limit position and the second movement limit position.

Abstract: A method includes an electrostatic capacitance detecting step of detecting electrostatic capacitances of opposing parts of a moving body side electrode and an oscillating plate electrode; an electrostatic capacitance storing step of storing the electrostatic capacitances at the first movement limit position and the second movement limit position detected at the electrostatic capacitance detecting step; a ratio calculating step of calculating a ratio of the electrostatic capacitances at the first movement limit position and the second movement limit position stored at the electrostatic capacitance storing step to a movement limit distance that is a distance between the first movement limit position and the second movement limit position; and an absolute position calculating step of calculating an absolute position of the moving body between the first movement limit position and the second movement limit position from the ratio.

Abstract: An inertial drive actuator includes a fixed member, a displacement generating mechanism of which, one end is adjacent to the fixed member, and a displacement is generated at the other end thereof, a driving mechanism which applies a voltage for displacing the displacement generating mechanism, a vibration substrate which is connected to the other end of the displacement generating mechanism, and which is displaceable in a direction of displacement, a mobile object which is disposed to be facing a vibration substrate electrode provided to the vibration substrate, and which moves with respect to the vibration substrate by an inertia, and a friction controlling mechanism which changes a frictional force between the mobile object and the vibration substrate.

Abstract: There is provided an inertial drive actuator in which, a small-sizing is easy, including a first displacement generating mechanism of which, one end is adjacent to a fixed member, and a first displacement is generated in the other end thereof, a second displacement generating mechanism of which, one end is adjacent to the fixed member, and which generates a second displacement in the other end thereof, a driving mechanism which applies a voltage for displacing the first displacement generating mechanism and the second displacement generating mechanism, a vibration substrate which is connected to the other end of the first displacement generating mechanism and the other end of the second displacement generating mechanism, and which is displaceable in a plane in which, there exist a direction of the first displacement and a direction of the second displacement, a mobile object which is disposed to be facing the vibration substrate, and which moves with respect to the vibration substrate by an inertia with respe

Abstract: An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

Abstract: An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.