Abstract: A power transmission device includes: a first rotating member rotated by power transmitted from a prime mover; a second rotating member rotating relative to the first rotating member; a first engagement member rotating integrally with the second rotating member at all times; a second engagement member pressed toward the first engagement member; and a moving member rotating integrally with the first rotating member at all times, separated from the first and second engagement members at an initial position, causing the second engagement member to rotate integrally with the first rotating member at a first preparation position where the moving member has moved from the initial position, and causing the second rotating member to rotate integrally with the first rotating member at a first switching position where the moving member has moved from the first preparation position.

Abstract: To provide a semiconductor device having improved reliability. An element isolation region comprised mainly of silicon oxide is buried in a trench formed in a semiconductor substrate. The semiconductor substrate in an active region surrounded by the element isolation region has thereon a gate electrode for MISFET via a gate insulating film. The gate electrode partially extends over the element isolation region and the trench has a nitrided inner surface. Below the gate electrode, fluorine is introduced into the vicinity of a boundary between the element isolation region and a channel region of MISFET.

Abstract: Throughput is improved in a substrate transfer device including a substrate transport robot having a substrate holding hand, and an aligner. A method of controlling a substrate transfer device includes moving a substrate holding hand holding a substrate to a predetermined ready position defined around an aligner, moving the substrate holding hand to a predetermined placement position defined by the aligner to transfer the substrate to a turntable of the aligner, causing the aligner to align the substrate while causing the substrate holding hand to wait at a predetermined waiting position defined at a position closer to the placement position than the ready position is, moving the substrate holding hand to the placement position to transfer the substrate from the aligner to the substrate holding hand, and moving the substrate holding hand holding the substrate to the ready position.

Abstract: An electronic circuit holder includes a fixing plate, a pair of side wall plates between which the fixing plate is interposed, and a seat having seat-side lock penetrating holes arranged at a predetermined interval. The fixing plate has a fixing portion for fixing an electronic circuit on the fixing plate, and lock protrusions on opposed sides of the fixing plate. Each side wall plate has lock penetrating holes. The lock protrusions of the fixing plate are engaged with the lock penetrating holes to hold the fixing plate at a predetermined height. A first of the pair of side wall plates has, on a side thereof, a first wall-side lock protrusion, and a second of the pair of side wall plates has, on a side thereof, a second wall-side lock protrusion. The first and second wall-side lock protrusions are engaged with two of the seat-side lock penetrating holes.

Abstract: An electronic circuit holder includes a fixing plate, a pair of side wall plates between which the fixing plate is interposed, and a seat having seat-side lock penetrating holes arranged at a predetermined interval. The fixing plate has a fixing portion for fixing an electronic circuit on the fixing plate, and lock protrusions on opposed sides of the fixing plate. Each side wall plate has lock penetrating holes. The lock protrusions of the fixing plate are engaged with the lock penetrating holes to hold the fixing plate at a predetermined height. A first of the pair of side wall plates has, on a side thereof, a first wall-side lock protrusion, and a second of the pair of side wall plates has, on a side thereof, a second wall-side lock protrusion. The first and second wall-side lock protrusions are engaged with two of the seat-side lock penetrating holes.

Abstract: Throughput is improved in a substrate transfer device including a substrate transport robot having a substrate holding hand, and an aligner. A method of controlling a substrate transfer device includes moving a substrate holding hand holding a substrate to a predetermined ready position defined around an aligner, moving the substrate holding hand to a predetermined placement position defined by the aligner to transfer the substrate to a turntable of the aligner, causing the aligner to align the substrate while causing the substrate holding hand to wait at a predetermined waiting position defined at a position closer to the placement position than the ready position is, moving the substrate holding hand to the placement position to transfer the substrate from the aligner to the substrate holding hand, and moving the substrate holding hand holding the substrate to the ready position.

Abstract: A method of teaching the target body edge position includes moving a photoelectric sensor optical axis to an initial position specified on the target body edge outer side installed so that the target body main surface is horizontal, and specified upper or lower than the target body, repeating an optical axis forward cycle until the target body edge is detected by the sensor, and obtaining the target body edge detected point position based on the substrate transfer robot posture when the target body edge is detected by the sensor to store the edge position. A movement cycle includes a series of movements including lifting or lowering passing through a height level of the target body, forward movement by a first movement amount in a horizontal scanning direction toward the target body, lowering or lifting passing through the level, and forward movement by the first movement amount in the scanning direction.

Abstract: Provided is a robot which automatically adjusts an original position without requiring attachment and detachment of a jig or a sensor dedicated to adjustment of the original position. The robot includes a robot arm having a plurality of links connected via a joint, an end effector coupled to a distal end of the robot arm via a wrist joint, an imaging device attached to the end effector or the robot arm so that a whole of the end effector and the robot arm in the original posture is included in the imaging range, and a controller that controls operations of the robot arm and the imaging device.

Abstract: A fluid system 10 according to the present disclosure includes an EAP sensor 13 disposed on an outer surface of a circuit conduit 11. The EAP sensor 13 includes a polymer element 131 including electrode layers 133A, 133B provided at respective surfaces of an ion-conductive polymer layer 132. The EAP sensor 13 is configured to output a signal corresponding to a deformation of the circuit conduit 11.

Abstract: A substrate transfer robot delivers/receives a substrate to/from the carrier for the substrate, coupled to an opening of the load port on a first side of the load port, from a second side opposite to the first side via the load port through the opening, and the substrate transfer robot includes a hand holding the substrate, a robot arm coupled to the hand and displacing the hand, an imaging device attached to the hand or the robot arm, and a controller configured to control operation of the robot arm and the imaging device. Controller acquires a captured image including a peripheral edge of the opening and carrier coupled to the opening and performs image processing on captured image to detect deviation of the coupling position of the carrier from a predetermined reference coupling position, the peripheral edge and the carrier being captured from the second side by the imaging device.

Abstract: The present invention provides a pharmaceutical composition for cancer treatment comprising an antibody against CCR8.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.

Abstract: According to one embodiment, a medical image diagnostic apparatus comprises a position acquisition unit, a data acquisition unit, an alignment unit, a decision unit, and a data generation unit. The position acquisition unit acquires the position of a medical tool in an imaging region with respect to the imaging region at the time of obtaining the medical image. The data acquisition unit acquires volume data corresponding to a three-dimensional region including the imaging region. The alignment unit decides the position of the volume data. The decision unit decides the position of the medical tool with respect to the volume data based on the position of the medical tool and the position of the volume data. The data generation unit generates support volume data by adding support information indicating the position of the medical tool to the volume data.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: To predict a temperature rise amount due to self-heating of a resistance value of a gate electrode with high accuracy in an HCI accelerated stress test. A gate electrode for gate resistance measurement (for temperature monitoring) that has contacts on its both sides, respectively, is disposed adjacent to the gate electrode. At the time of gate ON of the gate electrode, voltages that are substantially the same voltages as that of the gate electrode and have a minute potential difference between its contacts are applied between the contacts of the gate electrode for gate resistance measurement (for temperature monitoring), and a resistance value of the gate electrode for gate resistance measurement (for temperature monitoring) is measured.

Abstract: A robot diagnosing method detects a deviation amount caused by a lost motion and includes: a first step of preparing a robot including a robot arm having at least one joint portion, a work conveyed by the robot, and a prealigner including a processing portion configured to detect a center position of the work; and after the first to fifth steps, a sixth step of detecting the deviation amount caused by the lost motion at the one joint portion based on (i) the center position of the work based on the center position of the work detected in the second step and a command value from a robot control portion in the fourth step and (ii) the center position of the work detected in the fifth step.

Abstract: A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

Abstract: A wrist joint structure in which a direct drive motor is used is provided in a robot in which two hands are mounted on one robot arm. The robot includes: a robot arm; a plurality of stages of hands including a first hand and a second hand that are provided at a tip of the robot arm; a first direct drive motor in which a rotation axis is defined at the tip of the robot arm, the first direct drive motor coupling the first hand to the tip of the robot arm such that the first hand is rotatable about the rotation axis; and a second direct drive motor that couples the second hand to the first hand such that the second hand is rotatable about the rotation axis.