Abstract: A video signal encoding apparatus comprises a decoding unit for decoding each compression still image data into a frame image; a supplementary information, extracting unit for extracting supplementary information added to each compression frame image data; a motion prediction process adoption judging unit for judging, on the basis of the supplementary information, whether the frame image can be subjected to a motion prediction process; and a compression moving image generating unit for selecting the inter-frame prediction encoding method and the intra frame encoding method on the basis of a judgement result by the motion prediction process adoption judging unit to generate the moving image data.

Abstract: A signal processing apparatus supplied with a signal obtained by performing orthogonal transform on a video signal corresponding to a plurality of pixels includes a correction circuit for correcting the orthogonal-transformed signal, by using correction values obtained by performing orthogonal transform equivalent to the orthogonal transform on measured values obtained by measuring nonuniformity of display characteristics of a display device, which performs display on the basis of a signal processed by the signal processing apparatus. In addition, an inverse orthogonal transform device performs inverse orthogonal transform on a signal corrected by the correction circuit and thereby obtains a corrected video signal.

Abstract: A video signal encoding apparatus comprises a decoding unit for decoding each compression still image data into a frame image; a supplementary information, extracting unit for extracting supplementary information added to each compression frame image data; a motion prediction process adoption judging unit for judging, on the basis of the supplementary information, whether the frame image can be subjected to a motion prediction process; and a compression moving image generating unit for selecting the inter-frame prediction encoding method and the intra frame encoding method on the basis of a judgement result by the motion prediction process adoption judging unit to generate the moving image data.

Abstract: A signal processing apparatus supplied with a signal obtained by performing orthogonal transform on a video signal corresponding to a plurality of pixels includes a correction circuit for correcting the orthogonal-transformed signal, by using correction values obtained by performing orthogonal transform equivalent to the orthogonal transform on measured values obtained by measuring nonuniformity of display characteristics of a display device, which performs display on the basis of a signal processed by the signal processing apparatus, and an inverse orthogonal transform device for performing inverse orthogonal transform on a signal corrected by the correction circuit and thereby obtaining a corrected video signal.

Abstract: A recording apparatus having a memory for storing recording data, and an address counter for controlling addresses in the memory in the direction of the columns or rows. The address counter controls a read start address for starting a process of reading the memory, thereby compensating for deviations in the longitudinal or widthwise direction of recording paper.

Abstract: A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.

Abstract: A scanning exposure apparatus includes a supplying system for supplying exposure light to a substrate to be scanned in a direction. The exposure light has a predetermined intensity distribution in the direction of scan, a detecting device for detecting the light quantity of the exposure light, and a control system for controlling the supplying system on the basis of the light quantity and the predetermined intensity distribution of the exposure light.

Abstract: A stage mechanism suitable used in an exposure apparatus is disclosed, wherein heat generation of a coil assembly of a stage driving motor is prevented from adversely affecting a semiconductor substrate or measurement by a laser interferometer. A wafer chuck and the laser interferometer are disposed at a side of a base plate, and a stage and an electromagnetic coil for dirving the stage are disposed at the other side of the base plate. The wafer chuck and the stage are coupled to each other by a coupling member which extends through a bore formed in the base plate.

Abstract: A method and apparatus for measuring relative positional deviation between first and second diffraction gratings formed on an object is disclosed, wherein, in detection of a signal corresponding to the relative positional deviation between the first and second diffraction gratings, a suitable delay is determined in accordance with a signal corresponding to a relative positional deviation between third and fourth diffraction gratings formed on the object and having a predetected relative positional deviation, and wherein the measurement of the positional deviation between the first and second diffraction grating is done on the basis of a signal corresponding to that deviation and of the delay thus determined.

Abstract: Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.

Abstract: A recorder comprises a recording device housing for housing a device for forming a record on record medium at a record position and a relatively movable stacker for stacking record media recorded by the recording device and having an open side for removing the stacked media. A convex area on the bottom of the stacker extends othogonally to the length of the stacker at a position spaced from the lengthwise center of the stacker toward the open side. The convex portion inhibits movement of the stacked media which could occur through shocks received by the recorder.

Abstract: Exposure control method and apparatus particularly suitably usable in an X-ray exposure apparatus, for exposing a mask and a wafer to radiation (X-rays) from a synchrotron to transfer a pattern formed on a mask onto the wafer, is disclosed. A shutter device for controlling passage and interception of the synchrotron radiation is provided between the synchrotron and the wafer. The shutter device includes a blade member having a leading edge and a trailing edge which are rectilinearly movable in a direction in which there exists non-uniformness in illuminance of the radiation. The leading edge is used to determine the timing of start of passage of the radiation to the wafer, while the trailing edge is used to determine the timing of interception of the radiation. The moving speeds of the leading edge and the trailing edge are controlled independently of each other to provide different exposure times for different portions of an exposure region on the wafer, in accordance with the non-uniformness in illuminance.

Abstract: A recorder has a recording apparatus housing and a feeding apparatus housing hinged together for assuming open and closed positions. The recording apparatus housing holds recording apparatus and the feeding apparatus housing holds only feeding apparatus. When the housings are in the closed position, the feeding apparatus feeds paper past the recording apparatus. When they are in the open position, the recording and feeding apparatus are both exposed for easy access.

Abstract: There is described a color image processing apparatus in which time-sequential color image signals are converted into parallel by a delay circuit, then subjected to a desired image processing and again converted into time-sequential color image signals, thus achieving image processing in a simple inexpensive circuit.

Abstract: A vacuum-attraction holding device includes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway.

Abstract: There is described a color image processing apparatus in which time-sequential color image signals are converted into parallel by a delay circuit, then subjected to a desired image processing and again converted into time-sequential color image signals, thus achieving image processing in a simple inexpensive circuit.

Abstract: The present invention relates to a temperature control system for a lithographic exposure apparatus wherein a mask and wafer are closely disposed, and predetermined exposure energy is applied to respective shot areas of the wafer through the mask. The exposure energy is a soft-X-ray source, for example. The pattern of the mask is transferred onto the respective shot areas in a step-and-repeat manner. In the apparatus, a temperature control medium liquid is supplied into the wafer chuck which supports the wafer at the exposure position. The flow rate of the temperature control liquid is different during an exposure operation than during a non-exposure-operation. The flow control is determined in consideration of the wafer chuck vibration attributable to the supply of the liquid medium and also, of the heat generation in the wafer by the exposure energy, so that the vibration of the wafer chuck during the exposure operation is suppressed. Simultaneously the temperature rise of the wafer can also be suppressed.

Abstract: A color image processing apparatus includes line sensors and an A/D converter for entering color-sequential image data in which plural color component signals are sequentially arranged, a first converter for converting the color-sequential image data into parallel image data, a color image processor for effecting color image processing on the parallel image data obtained from the first converter, a second converter for converting the parallel image data into color-sequential image data, and a device for supplying the color-sequential image data converted by the second converter to the color-sequential image data processor at a next stage in the processing of the color component signals.

Abstract: Synchrotron orbital radiation (SOR) exposure system includes a SOR ring and a plurality of exposure apparatus each being coupled to the SOR ring and being arranged to expose a wafer to a mask pattern with X-rays contained in synchrotron radiation from the SOR ring to thereby print the mask pattern on the wafer. Specific arrangement is provided to allow communication of a control of the SOR ring and respective controls of the exposure apparatuses. If any abnormality such as vacuum leakage occurs in one exposure apparatus, the information is transmitted to all the controls to start, in all the exposure apparatuses, appropriate operations to protect the exposure apparatuses against the abnormality. This makes it possible to prevent stoppage of the SOR exposure system as a whole even when any abnormality occurs in one exposure apparatus.

Abstract: A recorder comprises a recording device housing for housing a device for forming a record on record medium at a record position and a relatively movable stacker for stacking record media recorded by the recording device and having an open side for removing the stacked media. A convex ara on the bottom of the stacker extends othogonally to the length of the stacker at a position spaced from the lengthwise center of the stacker toward the open side.