Patents by Inventor Thanh N. Phung

Thanh N. Phung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal proximity effects in lithography
    Patent number: 6993742
    Abstract: A proximity correction tool receives an indication of a feature in a lithographic design. The proximity correction tool predicts a film edge placement for the feature in a resist film based at least in part on thermal proximity effects in the resist film.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: January 31, 2006
    Assignee: Intel Corporation
    Inventors: David S. Fryer, Vivek K. Singh, Thanh N. Phung