Abstract: A microwave heating device enhances heating efficiency by a simple configuration. A microwave is led from one end of a conductive heating chamber in direction d2. The heating chamber is provided with an opening. A pair of conveying members are provided. A member to be heated sandwiched between the conveying members is moved in direction d1, and passes through the opening in direction d1 non-parallel to microwave traveling direction d2.

Abstract: A heating chamber is divided into a plurality of spaces by barrier sections including a conductive material. Phase shifters having different lengths with respect to a direction and including a dielectric body having permittivity higher than air are inserted in positions of a terminal section, in the spaces except for at least one space, to differentiate positions of bottoms of standing microwaves formed in the respective spaces from each other with respect to the direction. In addition, impedance adjusters having different lengths with respect to the direction and including a dielectric body having permittivity higher than air are inserted in positions on an upstream side of a region passed by the object to be heated, in the spaces except for at least one space, to reduce differences in impedance of the spaces from an entrance of the heating chamber to the terminal section including the phase shifters.

Abstract: An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.

Abstract: A microwave heating device includes a microwave generating portion outputting a microwave, a conductive heating chamber into which the microwave is led and having a short-circuited terminal end in a traveling direction of the microwave, and a tuner provided between the microwave generating portion and the heating chamber. The heating chamber has an opening for passing a member to be heated therethrough. The tuner re-reflects the microwave reflected at the terminal end of the heating chamber onto the heating chamber side. The microwave output end of the microwave generating portion and the tuner are connected by a square tubular waveguide made of a conductive material. The tuner and the terminal end of the heating chamber are connected by a square tubular waveguide, which is made of a conductive material except for the opening for passing the member to be heated therethrough.