Abstract: An optical measurement system includes: at least one optical beam transmitter; at least one optical beam detector for receiving the optical beam from the transmitter; modulation means for modulating the intensity of the transmitted optical beam; processor means for detecting the fractional and integer phase difference between the intensity modulation of the transmitted beam and the beam received by the receiver; and a calculator device for converting the integer and fractional phase difference into a distance between the transmitter and detector.

Abstract: A high-resolution synthetic aperture, adaptive optics system includes an imaging system having a plurality of optical elements including at least a primary mirror which is a section of the aperture to be synthesized, and a detector for receiving the radiation collected by the primary mirror; and a device for rotating the primary mirror section through a number of angular positions about the aperture being synthesized to obtain a plurality of component images of an object, at least one from each of the positions; a device for sensing distortion of an incident wavefront; and a device responsive to distortions of the wavefront for locally adjusting at least one of the optical elements to correct distortions in the wavefront.

Abstract: A high-resolution synthetic aperture telescope system includes a primary mirror which is a section of the aperture to be synthesized; and a device for rotating the primary mirror section through a number of angular positions about the aperture being synthesized to obtain a plurality of component images of an object, at least one from each of the positions.

Abstract: A curved glass X-Ray reflector having a curve depth d' including a glass plate having a stiffness S.sub.1 ; a backing plate having a stiffness S.sub.2 and a curved surface with curve depth d; and bonding means for joining the glass plate to the curved surface, the resulting curved glass reflector having curve depth d', where d' is equal to d/R and R is the ratio of (S.sub.1+ S.sub.2)/S.sub.2 ; and a method of making such a reflector.

Abstract: A spatial frequency filter including: an optical system having detector means and means for projecting onto the detector means an image of an object area; and means for operating the optical system alternately in a first mode to develop a first system transfer function and a second mode to develop a second system transfer function which is matched to the first system transfer function in low spatial frequencies and divergent therefrom in high spatial frequencies, for imposing on the detector means a first representation of the image in the first mode and a second representation of the image in the second mode, thereby providing a fluctuating elemental image output from each element of the detector means which derives from a high spatial frequency object; and also including means for limiting the wavelength range of input radiation to the detector means.

Abstract: An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer including: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally deforming the zones of the support member for realigning corresponding portions of a wafer mounted on the support member.

Abstract: A method of detecting a small elemental spectral source in a larger, spectral background, including producing a first interferogram of each element of an object area including the source and background; producing a second complementary interferogram of each element of that object area; projecting onto a detector images of the first and second interferograms and defocussing one of the first and second interferograms for providing a fluctuating elemental interferogram output from each element of the detector which receives an interferogram derived from the element of the object area that contains a source which spectrally distinguishes from the background, while reducing the output corresponding to each element containing no source to a constant and non-fluctuating level.