Patents by Inventor Theodore J. Vermeulen

Theodore J. Vermeulen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing a buried boss diaphragm structure in silicon
    Patent number: 6140143
    Abstract: A method of micromachining silicon to form relatively thick boss areas and relatively thin flexure areas. The method includes the provision of a deep diffusion of n-type dopant atoms in the vicinity of the desired thick boss structures on a p-type silicon substrate. A layer having a thickness equal to the desired thickness of a flexure area is epitaxially grown of n-type doped silicon over the previously doped p-type substrate. Finally, the p-type doped silicon is etched away by a suitable etchant leaving relatively thick boss areas joined by relatively thin flexure areas.
    Type: Grant
    Filed: February 10, 1992
    Date of Patent: October 31, 2000
    Assignee: Lucas Novasensor Inc.
    Inventors: Lee A. Christel, Theodore J. Vermeulen