Abstract: A gas-using facility including a portable dry scrubber system and/or over-pressure control arrangement. The portable dry scrubber system is of a unitary modular form, accommodating transport and ready set-up, take-down, and redeployment in the process facility. The over-pressure control arrangement provides capability for release of over-pressure gas from a compressed gas storage vessel during an over-pressure event, e.g., overheating of a compressed gas cylinder during a semiconductor foundry fire, while avoiding the bulk release of the entire vessel contents that occurs when conventional pressure relief devices are employed.

Abstract: An apparatus and method are provided for treating pollutants in a process effluent stream. The apparatus comprises an up-flow canister having a lower section plenum space, a section for a sorbent bed material, an upper section plenum space, an inlet for introducing a process effluent stream to the lower section plenum space, and an outlet for egress of the process effluent stream from the canister, the inlet, lower section plenum space, and sorbent bed material being arranged in a manner which provides for process effluent stream to flow into the sorbent bed against gravity, by a pressure differential.