Patents by Inventor Theresa A. Core
Theresa A. Core has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 6192757Abstract: A monolithic capacitance-type microstructure includes a semiconductor substrate, a plurality of posts extending from the surface of the substrate, a bridge suspended from the posts, and an electrically-conductive, substantially stationary element anchored to the substrate. The bridge includes an element that is laterally movable with respect to the surface of the substrate. The substantially stationary element is positioned relative to the laterally movable element such that the laterally movable element and the substantially stationary element form a capacitor. Circuitry is disposed on the substrate and operationally coupled to the movable element and the substantially stationary element for processing a signal based on a relative positioning of the movable element and the substantially stationary element. A method for fabricating the microstructure and the circuitry is disclosed.Type: GrantFiled: December 6, 1999Date of Patent: February 27, 2001Assignee: Analog Devices, Inc.Inventors: Robert W. K. Tsang, Theresa A. Core, Steven J. Sherman, A. Paul Brokaw
-
Patent number: 6009753Abstract: A monolithic capacitance-type microstructure includes a semiconductor substrate, a plurality of posts extending from the surface of the substrate, a bridge suspended from the posts, and an electrically-conductive, substantially stationary element anchored to the substrate. The bridge includes an element that is laterally movable with respect to the surface of the substrate. The substantially stationary element is positioned relative to the laterally movable element such that the laterally movable element and the substantially stationary element form a capacitor. Circuitry may be disposed on the substrate and operationally coupled to the movable element and the substantially stationary element for processing a signal based on a relative positioning of the movable element and the substantially stationary element. A method for fabricating the microstructure and the circuitry is disclosed.Type: GrantFiled: December 2, 1998Date of Patent: January 4, 2000Assignee: Analog Devices, Inc.Inventors: Robert W. K. Tsang, Theresa A. Core, Steven J. Sherman, A. Paul Brokaw
-
Patent number: 5858809Abstract: A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.Type: GrantFiled: March 18, 1997Date of Patent: January 12, 1999Assignee: Analog DevicesInventors: Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Theresa A. Core, Steven J. Sherman
-
Patent number: 5847280Abstract: A monolithic capacitance-type microstructure includes a semiconductor substrate, a plurality of posts extending from the surface of the substrate, a bridge suspended from the posts, and an electrically-conductive, substantially stationary element anchored to the substrate. The bridge includes an element that is laterally movable with respect to the surface of the substrate. The substantially stationary element is positioned relative to the laterally movable element such that the laterally movable element and the substantially stationary element form a capacitor. Circuitry may be disposed on the substrate and operationally coupled to the movable element and the substantially stationary element for processing a signal based on a relative positioning of the movable element and the substantially stationary element. A method for fabricating the microstructure and the circuitry is disclosed.Type: GrantFiled: May 23, 1995Date of Patent: December 8, 1998Assignee: Analog Devices, Inc.Inventors: Steven J. Sherman, Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw
-
Patent number: 5828115Abstract: A polysilicon ground plane is formed over dielectric layers and under a suspended, movable mass in a surface micromachined device. The process includes steps of forming a diffused region in a substrate, forming the dielectric layers over the substrate, forming the ground plane over dielectric layers, and forming a body having a suspended mass, a first anchor extending from the mass down to the diffused region, and a second anchor extending from the down to the ground plane. The two anchors are formed simultaneously. The ground plane, which can be formed with only three additional steps over prior processes, serves as a ground plane to control changes and also as a local interconnect.Type: GrantFiled: November 22, 1996Date of Patent: October 27, 1998Assignee: Analog Devices, Inc.Inventor: Theresa A. Core
-
Patent number: 5640039Abstract: A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.Type: GrantFiled: December 1, 1994Date of Patent: June 17, 1997Assignee: Analog Devices, Inc.Inventors: Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Theresa A. Core, Steven J. Sherman
-
Patent number: 5620931Abstract: A monolithic capacitance-type microstructure includes a semiconductor substrate, a plurality of posts extending from the surface of the substrate, a bridge suspended from the posts, and an electrically-conductive, substantially stationary element anchored to the substrate. The bridge includes an element that is laterally movable with respect to the surface of the substrate. The substantially stationary element is positioned relative to the laterally movable element such that the laterally movable element and the substantially stationary element form a capacitor. Circuitry may be disposed on the substrate and operationally coupled to the movable element and the substantially stationary element for processing a signal based on a relative positioning of the movable element and the substantially stationary element. A method for fabricating the microstructure and the circuitry is disclosed.Type: GrantFiled: June 6, 1995Date of Patent: April 15, 1997Assignee: Analog Devices, Inc.Inventors: Robert W. K. Tsang, Theresa A. Core
-
Patent number: 5578224Abstract: A polysilicon ground plane is formed over dielectric layers and under a suspended, movable mass in a surface micromachined device. The process includes steps of forming a diffused region in a substrate, forming the dielectric layers over the substrate, forming the ground plane over dielectric layers, and forming a body having a suspended mass, a first anchor extending from the mass down to the diffused region, and a second anchor extending from the mass down to the ground plane. The two anchors are formed simultaneously. The ground plane, which can be formed with only three additional steps over prior processes, serves as a ground plane to control changes and also as a local interconnect.Type: GrantFiled: June 7, 1995Date of Patent: November 26, 1996Assignee: Analog Devices, Inc.Inventor: Theresa A. Core
-
Patent number: 5540095Abstract: An accelerometer comprising a microfabricated acceleration sensor and monolithically fabricated signal conditioning circuitry. The sensor comprises a differential capacitor arrangement formed by a pair of capacitors. Each capacitor has two electrodes, one of which it shares electrically in common with the other capacitor. One of the electrodes (e.g., the common electrode) is movable and one of the electrodes is stationary in response to applied acceleration. The electrodes are all formed of polysilicon members suspended above a silicon substrate. Each of the capacitors is formed of a plurality of pairs of electrode segments electrically connected in parallel and, in the case of the movable electrodes, mechanically connected to move in unison. When the substrate is accelerated, the movable electrodes move such that the capacitance of one of the capacitors increases, while that of the other capacitor decreases.Type: GrantFiled: April 14, 1995Date of Patent: July 30, 1996Assignee: Analog Devices, Inc.Inventors: Steven J. Sherman, A. Paul Brokaw, Robert W. K. Tsang, Theresa Core
-
Patent number: 5417111Abstract: The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.Type: GrantFiled: June 10, 1993Date of Patent: May 23, 1995Assignee: Analog Devices, Inc.Inventors: Steven J. Sherman, Robert W. K. Tsang, Theresa A. Core, A. Paul Brokaw
-
Patent number: 5345824Abstract: An accelerometer comprising a microfabricated acceleration sensor and monolithically fabricated signal conditioning circuitry. The sensor comprises a differential capacitor arrangement formed by a pair of capacitors. Each capacitor has two electrodes, one of which it shares electrically in common with the other capacitor. One of the electrodes (e.g., the common electrode) is movable and one of the electrodes is stationary in response to applied acceleration. The electrodes are all formed of polysilicon members suspended above a silicon substrate. Each of the capacitors is formed of a plurality of pairs of electrode segments electrically connected in parallel and, in the case of the movable electrodes, mechanically connected to move in unison. When the substrate is accelerated, the movable electrodes move such that the capacitance of one of the capacitors increases, while that of the other capacitor decreases.Type: GrantFiled: March 4, 1993Date of Patent: September 13, 1994Assignee: Analog Devices, Inc.Inventors: Steven J. Sherman, A. Paul Brokaw, Robert W. K. Tsang, Theresa Core
-
Patent number: 5326726Abstract: The invention comprises a method for fabricating a monolithic chip containing integrated circuitry as well as a suspended polysilicon microstructure. The inventive method comprises 67 processes which are further broken down into approximately 330 steps. The processes and their arrangement allow for compatible fabrication of transistor circuitry and the suspended polysilicon microstructure on the same chip.Type: GrantFiled: June 21, 1993Date of Patent: July 5, 1994Assignee: Analog Devices, Inc.Inventors: Robert W. K. Tsang, Theresa A. Core
-
Patent number: 5314572Abstract: A suspended microstructure fabrication process. Photoresist pedestals are inserted in a sacrificial layer between the suspended microstructure and the substrate and photoresist spacers are inserted in the microstructure layer between non contacting portions of the suspended microstructure so that the photoresist pedestals and spacers support the microstructure bridge during the wet etching and drying process used to remove the sacrificial layer.Type: GrantFiled: April 22, 1992Date of Patent: May 24, 1994Assignee: Analog Devices, Inc.Inventors: Theresa A. Core, Roger T. Howe