Abstract: A pump unit includes a rough-vacuum pump and a Roots vacuum pump connected in series and upstream of the rough-vacuum pump in the direction of flow of the pumped gases. The Roots vacuum pump has three pumping stages in which the rotors are designed to be driven simultaneously in rotation by a motor of the Roots vacuum pump. A ratio of the flow rate generated by the first pumping stage of the rough-vacuum pump in the direction of flow of the pumped gases over the flow rate generated by the last pumping stage of the rough-vacuum pump is less than or equal to four.

Abstract: A pump unit includes a rough-vacuum pump and a Roots vacuum pump connected in series and upstream of the rough-vacuum pump in the direction of flow of the pumped gases. The Roots vacuum pump has three pumping stages in which the rotors are designed to be driven simultaneously in rotation by a motor of the Roots vacuum pump. A ratio of the flow rate generated by the first pumping stage of the rough-vacuum pump in the direction of flow of the pumped gases over the flow rate generated by the last pumping stage of the rough-vacuum pump is less than or equal to four.

Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Abstract: A device for ejecting an at least diphasic mixture includes an injection inlet for a liquid and a gas, a distribution chamber for producing a first liquid-gas mixture, an ejection nozzle of the first liquid-gas mixture in a main direction defined by an axis-vector. The ejection nozzle has a geometry comprising, on its length at least, a minimal section or neck at a location of the axis-vector. Among others things, due to the nozzle geometry, the expansion obtained inside the ejection nozzle allows the first liquid-gas mixture from the distribution chamber to be converted into a second mixture, according to the flow configuration, consisting for instance of a diphasic mist jet having an ejection range and liquid particle size that can be controlled according to the liquid and gas mass flow and to the absolute pressure at the injection inlet.

Abstract: The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21).

Abstract: A device for ejecting an at least diphasic mixture includes an injection inlet for a liquid and a gas, a distribution chamber for producing a first liquid-gas mixture, an ejection nozzle of the first liquid-gas mixture in a main direction defined by an axis-vector. The ejection nozzle has a geometry comprising, on its length at least, a minimal section or neck at a location of the axis-vector. Among others things, due to the nozzle geometry, the expansion obtained inside the ejection nozzle allows the first liquid-gas mixture from the distribution chamber to be converted into a second mixture, according to the flow configuration, consisting for instance of a diphasic mist jet having an ejection range and liquid particle size that can be controlled according to the liquid and gas mass flow and to the absolute pressure at the injection inlet.