Patents by Inventor Thilo Sandner
Thilo Sandner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9620375Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: GrantFiled: March 26, 2015Date of Patent: April 11, 2017Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.Inventors: Sergiu Langa, Christian Drabe, Thilo Sandner
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Patent number: 9164277Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.Type: GrantFiled: July 10, 2013Date of Patent: October 20, 2015Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Holger Conrad, Harald Schenk, Christian Schirrmann, Thilo Sandner, Fabian Zimmer, Jan-Uwe Schmidt
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Publication number: 20150200105Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: ApplicationFiled: March 26, 2015Publication date: July 16, 2015Inventors: Sergiu LANGA, Christian DRABE, Thilo SANDNER
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Patent number: 8873128Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.Type: GrantFiled: July 6, 2010Date of Patent: October 28, 2014Assignees: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V., Technische Universitaet DresdenInventors: Holger Conrad, Thomas Grasshoff, Denis Jung, Thilo Sandner
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Patent number: 8842356Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.Type: GrantFiled: February 29, 2012Date of Patent: September 23, 2014Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Harald Schenk, Joerg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig, Thomas Knieling
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Publication number: 20130301101Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.Type: ApplicationFiled: July 10, 2013Publication date: November 14, 2013Inventors: Holger CONRAD, Harald SCHENK, Christian SCHIRRMANN, Thilo SANDNER, Fabian ZIMMER, Jan-Uwe SCHMIDT
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Publication number: 20120188625Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.Type: ApplicationFiled: February 29, 2012Publication date: July 26, 2012Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Harald Schenk, Joerg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig, Thomas Knieling
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Publication number: 20120099175Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.Type: ApplicationFiled: July 6, 2010Publication date: April 26, 2012Inventors: Holger Conrad, Thomas Grasshoff, Denis Jung, Thilo Sandner
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Patent number: 8147136Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.Type: GrantFiled: March 31, 2008Date of Patent: April 3, 2012Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.Inventors: Jörg Heber, Thomas Klose, Thilo Sandner, Andreas Bergmann, Christian Gerwig, Thomas Knieling
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Patent number: 7940439Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.Type: GrantFiled: March 31, 2008Date of Patent: May 10, 2011Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Denis Jung, Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter
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Patent number: 7932788Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: GrantFiled: April 24, 2006Date of Patent: April 26, 2011Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.v.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Patent number: 7929192Abstract: In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.Type: GrantFiled: March 31, 2008Date of Patent: April 19, 2011Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventor: Thilo Sandner
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Patent number: 7898071Abstract: An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.Type: GrantFiled: January 9, 2008Date of Patent: March 1, 2011Assignee: Faunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thor Bakke, Thilo Sandner
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Patent number: 7847997Abstract: A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.Type: GrantFiled: February 27, 2008Date of Patent: December 7, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thilo Sandner, Harald Schenk, Michael Scholles, Markus Schwarzenberg, Alexander Wolter
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Patent number: 7841242Abstract: The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.Type: GrantFiled: February 3, 2006Date of Patent: November 30, 2010Assignee: Fraunhofer-Gesellschaft zur Foderung der Angewandten Forschung E.V.Inventors: Holger Conrad, Thomas Klose, Thilo Sandner
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Patent number: 7830577Abstract: A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.Type: GrantFiled: January 3, 2008Date of Patent: November 9, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Thomas Grasshoff, Thomas Klose, Thilo Sandner
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Patent number: 7760414Abstract: An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.Type: GrantFiled: March 31, 2008Date of Patent: July 20, 2010Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Harald Schenk, Thilo Sandner
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Publication number: 20090302960Abstract: The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.Type: ApplicationFiled: April 24, 2006Publication date: December 10, 2009Applicant: Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.Inventors: Harald Schenk, Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose
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Publication number: 20090293632Abstract: The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.Type: ApplicationFiled: February 3, 2006Publication date: December 3, 2009Applicant: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.Inventors: Holger Conrad, Thomas Klose, Thilo Sandner
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Patent number: 7573634Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.Type: GrantFiled: June 27, 2005Date of Patent: August 11, 2009Assignee: Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V.Inventors: Uwe Jan Schmidt, Thilo Sandner, Harald Schenk, Alexandre Gatto, Minghong Yang, Jörg Heber, Norbert Kaiser