Abstract: A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15?, 16, 16?) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5).

Abstract: Valve (1), in particular vacuum valve, having a passage opening (2) and a closure member (3), it being possible for the closure member (3) to be moved by a valve drive (4) of the valve (1) in a closing direction (5) from an open position, in which it releases the passage opening (2), into a closed position, in which it closes the passage opening (2), and in the reverse direction. The closure member (3) is arranged in the closed position between two valve seats (6, 7) which lie opposite one another and surround the passage opening (2), and a first closure member part (8) of the closure member (3) bears against a first of the valve seats (6) in the closed position and a second closure member part (9) bears against the second valve seat (7) in the closed position. The closure member parts (8, 9) are mounted such that they can be displaced relative to one another in the closing direction (5).

Abstract: A valve housing for a vacuum valve has opposed valve openings (8, 9), which have axes (10, 11) and are surrounded by flanges (6, 7) of the valve housing, these flanges being connected to housing parts (1, 2) of the valve housing. A respective flange (6, 7) has, or is formed on the whole by, a sheet metal part (12, 13) formed in a U-shaped manner, as viewed in a longitudinal center section through the flange (6, 7), parallel to the axis (10, 11) of the valve opening (8, 9), and directed via its open side toward the housing part (1, 2). The U-shaped sheet metal part (12, 13) includes inner and outer branches (14, 15) annularly surrounding the axis (10, 11) of the valve opening (8, 9) and a base crosspiece (16) connecting the inner and the outer branch (14, 15).

Abstract: A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15?, 16, 16?) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5).

Abstract: A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.

Abstract: A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside the working space, and at least one connecting rod which is led from the working space in a gas-tight manner to the valve closure. A static guide rod extends centrally and parallel to the adjustment axis inside the working space and is led through the piston. A precision linear bearing is between the piston and the guide rod. The piston is linearly guided by the guide rod with high precision and centered in the working space so that the valve closure is moved with high precision and pressed onto the valve seat.

Abstract: The invention relates to a vacuum valve drive (1) for linear displacement of a valve closure (2) along an adjustment axis (3) between an opened position (A) of the vacuum valve (4) and a position (B) in which it is closed gas-tight, and to a vacuum valve (4) comprising the vacuum valve drive (1). The vacuum valve drive (1) comprises a drive housing (5) which contains a gas-tight working space (6), a piston (7) inside the working space (6), which divides the working space (6) into a first and a second pressure space (6a, 6b), and at least one connecting rod (8; 9) which is led from the working space (6) in a gas-tight manner to the valve closure (2). According to the invention, a static guide rod (11) which extends centrally and parallel to the adjustment axis (3) inside the working space (6) and is led through the piston (7), and a precision linear bearing (12) between the piston (7) and the guide rod (11), are provided.

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is

Abstract: A vacuum valve comprises a valve body with a valve opening having an axis a closing member which is displaceable between an open position of the valve and a closed position of the valve in a closing direction extending at an angle to the axis of the valve opening, a sealing surface which surrounds the valve opening and which has at least two main portions which are arranged so as to be offset relative to one another in the direction of the axis of the valve opening, are connected with one another by connection portions, and whose imaginary generating lines have at least a portion or a tangent extending substantially vertical to the closing direction, a circumferentially closed seal which is arranged at the closing member and which has two main portions corresponding to the main portions of the sealing surface and connection portions which connect the two main portions, which seal can be placed against the sealing surface by of a displacement of the closing member in the closed position of the valve, wherein a

Abstract: A vacuum valve comprises a valve body (1) with a valve opening (3) having an axis (4); a closing member (2) which is displaceable between an open position of the valve and a closed position of the valve in a closing direction (5) extending at an angle to the axis of the valve opening (3); a sealing surface (7) which surrounds the valve opening (3) and which has at least two main portions (8) which are arranged so as to be offset relative to one another in direction of the axis (4) of the valve opening (3), are connected with one another by connection portions (9), and whose imaginary generating lines (10) have at least a portion or a tangent (22) extending substantially vertical to the closing direction (5); a circumferentially closed seal (12) which is arranged at the closing member (5) and which has two main portions (13) corresponding to the main portions (8) of the sealing surface (7) and connection portions (14) which connect these two main portions (13), which seal (12) can be placed against the sealing

Abstract: A device for closing an opening of a tank or a tubular conduit and including a plate for closing the opening and movable substantially perpendicular to a plane of the opening toward the opening to be pressed against a wall in which the opening is formed and away from the opening, and displaceable, in its position in which it is spaced from the opening, substantially parallel to the plane of the opening, first and second piston-cylinder units for displacing the closing plate parallel to the plane of the opening and perpendicular to the plane of the opening respectively, with each piston-cylinder unit having a housing with a cylinder bore and at least one piston displaceable in the cylinder bore relative to the housing, and conduits for communicating pressure medium to the cylinder bores of both piston-cylinder units for displacing respective pistons in respective bores.

Abstract: A closing assembly for a chamber including, a housing-like member, a closing plate displaceable in the housing-like member for closing the chamber through-opening, and a drive unit for displacing the closing plate, with the housing-like member having two mutually perpendicular flange-like connection surfaces defining an angle of 90.degree. therebetween, and with attachment screws-receiving bores having their axis extending approximately parallel to the bisectrix of the angle formed by the two connection surfaces.