Patents by Inventor Thomas Hollerbach
Thomas Hollerbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240184097Abstract: A digital lithography system may adjust a wavelength of the light source to compensate for tilt errors in micromirrors while maintaining a perpendicular direction for the reflected light. Adjacent pixels may have a phase shift that is determined by an optical path difference between their respective light beams. This phase shift may be preselected to be any value by generating a corresponding wavelength at the light source based on the optical path difference. To generate a specific wavelength corresponding to the desired phase shift, the light source may produce multiple light components that have wavelengths that bracket the wavelength of the selected phase shift. The intensities of these components may then be controlled individually to produce an effect that approximates the selected phase shift on the substrate.Type: ApplicationFiled: February 13, 2024Publication date: June 6, 2024Applicant: Applied Materials, Inc.Inventors: Thomas L. Laidig, Christopher Bencher, Hwan J. Jeong, Uwe Hollerbach
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Publication number: 20240094648Abstract: Aspects of disclosure provide a method for attaching wiring connections to a component using both design and field measured data of the component to produce accurate wiring connections.Type: ApplicationFiled: November 29, 2023Publication date: March 21, 2024Inventors: Uwe HOLLERBACH, Thomas L. LAIDIG
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Patent number: 11934762Abstract: Systems and methods disclosed are generally related to masklessly developing connections between a chip-group and a design connection point on a substrate. In placement of the chip-group on the substrate, according to certain embodiments the chip-group may be dispositioned relative to an expected position per a substrate layout design, causing a connection misalignment with the design connection point. According to certain embodiments, a machine learning (ML) model is trained on historical and simulated pixel models of chip-group connections and design connection points. Upon determining the chip-group misalignment by a metrology measurement, the trained ML model determines a pixel model to connect the misaligned chip-group, and causes the pixel model to be exposed to a substrate with a digital lithography tool, thereby connecting the dispositioned chip-group to the design connection point.Type: GrantFiled: August 6, 2021Date of Patent: March 19, 2024Assignee: Applied Materials, Inc.Inventors: Tamer Coskun, Aidyn Kemeldinov, Chung-Shin Kang, Uwe Hollerbach, Thomas L Laidig
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Patent number: 7859684Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser bean is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.Type: GrantFiled: May 15, 2009Date of Patent: December 28, 2010Assignee: Carl Zeiss Meditec AGInventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
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Publication number: 20090326522Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser bean is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.Type: ApplicationFiled: May 15, 2009Publication date: December 31, 2009Applicant: Carl Zeiss Meditec AGInventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
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Patent number: 7545515Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser beam is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.Type: GrantFiled: October 24, 2006Date of Patent: June 9, 2009Assignee: Carl Zeiss Meditec AGInventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
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Patent number: 7537591Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.Type: GrantFiled: March 29, 2007Date of Patent: May 26, 2009Assignee: Carl Zeiss Meditec AGInventors: Torsten Feige, Claus Goder, Thomas Hollerbach
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Publication number: 20070250049Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.Type: ApplicationFiled: March 29, 2007Publication date: October 25, 2007Applicant: CARL ZEISS MEDITEC AGInventors: Torsten Feige, Claus Goder, Thomas Hollerbach
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Publication number: 20070161973Abstract: A device for shaping objects by removal of material from the surface thereof with a pulsed laser beam and a deflecting device through which the laser beam is guided over the surface of the object. An optical device is provided for changing the distribution of the radiation intensity inside the laser beam cross section. After the passage of the laser beam through this optical device, the radiation intensity has a bell-shaped or Gaussian distribution, or a distribution similar to a bell-shaped or Gaussian distribution, in at least one cross-sectional direction through the laser beam.Type: ApplicationFiled: October 24, 2006Publication date: July 12, 2007Applicant: Carl Zeiss Meditec AGInventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
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Patent number: 7211078Abstract: A method for measuring at least one of an energy and a position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor, which measures its energy and/or position. In addition, a device for measuring at least one of an energy and a position of a pulsed laser beam. The device includes a sensor configured to measure at least one of the energy and the position of the pulsed laser beam, and a beam deflection device, which is configured to guide the pulsed laser beam and to intermittently direct the pulsed laser beam at the sensor.Type: GrantFiled: May 17, 2001Date of Patent: May 1, 2007Assignee: Carl Zeiss Meditec AGInventors: Torsten Feige, Claus Goder, Thomas Hollerbach
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Patent number: 7128737Abstract: A device for figuring objects by means of material erosion of the surface thereof, comprising a pulsed laser beam and a deflection device through which the laser beam is directed at the object surface and via which the object surface is guided. The invention is suitable for figuring natural optical lenses made from a biological substance or artificial optical lenses. The inventive device is provided with an optical device to modify the distribution of the radiation intensity inside the laser beam cross section. The radiation intensity, once the laser beam has passed through the optical device, has a bell-shaped or Gaussian-like distribution in at least one cross sectional direction through the laser beam.Type: GrantFiled: October 20, 1990Date of Patent: October 31, 2006Assignee: Carl Zeiss Meditec AGInventors: Claus Goder, Thomas Hollerbach, Juergen Kuehnert, Eckhard Schroeder
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Publication number: 20040039377Abstract: The invention relates to a device and method for measuring the energy and/or the position of a pulsed laser beam, notably in an ophthalmologic excimer laser. The pulsed laser beam is intermittently directed at a sensor which detects its energy and/or position.Type: ApplicationFiled: November 14, 2002Publication date: February 26, 2004Inventors: Torsten Feige, Claus Goder, Thomas Hollerbach