Patents by Inventor Thomas J. Dunlap

Thomas J. Dunlap has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder and method of use
    Patent number: 5578167
    Abstract: The etching of a thin substrate (23) is performed using a holder (10). The holder (10) has a base (11) that has a cavity (20). The cavity (20) is pressurized to compensate for the pressure and stress that is applied to the substrate (23) by an etchant solution. The holder (10) also has a sequence of o-rings (22,24,26) that are used to hold the substrate (23) in place and to prevent etchant from leaking into the cavity (20) and attacking a bottom surface (32) of the substrate (23). The pressure necessary to hold the substrate (23) in place is applied by a cover ring (28) that is screwed onto the base (11).
    Type: Grant
    Filed: January 31, 1996
    Date of Patent: November 26, 1996
    Assignee: Motorola, Inc.
    Inventors: Kathirgamasundaram Sooriakumar, Steven A. Switzer, Kenneth E. Stegall, Thomas J. Dunlap, Colleen M. Albrecht