Abstract: A method of bonding a first corrugated sheet and a second corrugated sheet to provide a honeycomb core assembly. The first corrugated sheet includes a plurality of lower node regions and the second corrugated sheet includes a plurality of upper node regions. The method includes applying a radio frequency activatable adhesive to one or both of a first lower node region of the first corrugated sheet and a first upper node region of the second corrugated sheet, positioning the first corrugated sheet adjacent to or in contact with the second corrugated sheet at the first upper node region and the first lower node region, and exposing the radio frequency activatable adhesives to a radio frequency to activate the radio frequency activatable adhesive, such that the first corrugated sheet is bonded to the second corrugated sheet.

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.