Patents by Inventor Thomas J. Knisley

Thomas J. Knisley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THERMALLY STABLE VOLATILE PRECURSORS
    Publication number: 20180265975
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Application
    Filed: May 21, 2018
    Publication date: September 20, 2018
    Inventors: Charles H. WINTER, Thomas J. KNISLEY
  • Thermally stable volatile precursors
    Patent number: 9982344
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Grant
    Filed: July 20, 2016
    Date of Patent: May 29, 2018
    Assignee: WAYNE STATE UNIVERSITY
    Inventors: Charles H. Winter, Thomas J. Knisley
  • Thermally stable volatile precursors
    Patent number: 9822446
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: November 21, 2017
    Assignee: Wayne State University
    Inventors: Charles H. Winter, Thomas J. Knisley
  • THERMALLY STABLE VOLATILE PRECURSORS
    Publication number: 20160326645
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Application
    Filed: July 20, 2016
    Publication date: November 10, 2016
    Inventors: Charles H. WINTER, Thomas J. KNISLEY
  • THERMALLY STABLE VOLATILE PRECURSORS
    Publication number: 20160152650
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Application
    Filed: February 5, 2016
    Publication date: June 2, 2016
    Inventors: Charles H. WINTER, Thomas J. KNISLEY
  • Thermally stable volatile precursors
    Patent number: 9255327
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Grant
    Filed: August 23, 2011
    Date of Patent: February 9, 2016
    Assignee: Wayne State University
    Inventors: Charles H. Winter, Thomas J. Knisley
  • ATOMIC LAYER DEPOSITION OF TRANSITION METAL THIN FILMS
    Publication number: 20140234550
    Abstract: An atomic layer deposition method for forming metal films on a substrate comprises a deposition cycle including: a) contacting a substrate with a vapor of a metal-containing compound described by formula 1 for a first predetermined pulse time to form a first modified surface: MLn ??(1) wherein: n is 1 to 8; M is a transition metal; L is a ligand; b) contacting the first modified surface with an acid for a second predetermined pulse time to form a second modified surface; and c) contacting the second modified surface with a reducing agent for a third predetermined pulse time to form a metal layer.
    Type: Application
    Filed: June 5, 2012
    Publication date: August 21, 2014
    Applicant: WAYNE STATE UNIVERSITY
    Inventors: Charles H. Winter, Thomas J. Knisley, Thiloka Ariyasena
  • THERMALLY STABLE VOLATILE PRECURSORS
    Publication number: 20130164456
    Abstract: A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
    Type: Application
    Filed: August 23, 2011
    Publication date: June 27, 2013
    Applicant: WAYNE STATE UNIVERSITY
    Inventors: Charles H. Winter, Thomas J. Knisley