Patents by Inventor Thomas Joseph Banholzer

Thomas Joseph Banholzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Clamp ring for domed heated pedestal in wafer processing chamber
    Patent number: 5725718
    Abstract: A chamber for processing a semiconductor wafer, in which the chamber houses a domed pedestal for supporting the wafer inside the chamber and a clamp ring having a seat formed therein. The seat receives and holds down the periphery of the wafer onto the domed pedestal and includes a wafer engaging surface which engages and holds down the periphery of the wafer. In use the wafer engaging surface defines an angle to the horizontal which is greater than or equal to the angle to the horizontal defined by a tangent to the domed pedestal at the point where the periphery of the wafer is held down onto the pedestal. Typically the angle to the horizontal defined by the seat is about 3.degree. greater than the angle of the tangent to the domed pedestal at the point where the wafer is held down onto the pedestal.
    Type: Grant
    Filed: August 24, 1994
    Date of Patent: March 10, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Joseph Banholzer, Dan Marohl