Patents by Inventor Thomas McWaid

Thomas McWaid has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170336311
    Abstract: A measurement apparatus and method for determining a viscosity of a fluid are disclosed. A predetermined pre-fill portion of a sample of the fluid is injected into a capillary at a predetermined flow rate. The pressure differential across the capillary is determined, and the measurement is aborted when the measured pressure is greater than a predetermined maximum pressure. When the measured pressure is less than the predetermined maximum pressure, the remaining portion of the sample is injected into through the capillary. The viscosity of the sample is calculated based on a pressure within the capillary during the injection of the remaining portion of the sample.
    Type: Application
    Filed: August 7, 2017
    Publication date: November 23, 2017
    Inventors: John Varni, Thomas McWaid, Anny Tangkilisan, John Kirkwood, Barry Wong, Stephen Lambert
  • Patent number: 7278301
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Grant
    Filed: June 8, 2006
    Date of Patent: October 9, 2007
    Assignee: KLA-Tencor Corporation
    Inventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
  • Publication number: 20070089857
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Application
    Filed: February 10, 2006
    Publication date: April 26, 2007
    Inventors: Tony Chiang, David Lazovsky, Thomas Boussie, Thomas McWaid, Alexander Gorer
  • Publication number: 20060230819
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: June 8, 2006
    Publication date: October 19, 2006
    Applicant: KLA-Tencor Corporation
    Inventors: Thomas McWaid, Peter Panagas, Steven Eaton, Amin Samsavar, William Wheeler
  • Publication number: 20060207318
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: June 5, 2006
    Publication date: September 21, 2006
    Applicant: KLA-Tencor Corporation
    Inventors: Thomas McWaid, Peter Panagas, Steven Eaton, Amin Samsavar, William Wheeler
  • Publication number: 20060054543
    Abstract: The invention relates to liquid chromatography techniques for rapidly characterizing samples, such as polymer solutions, emulsions and dispersions, and to devices for implementing such techniques. The system includes a design that provides the ability to perform chromatographic separations by using mobile phase composition gradients and temperature gradients during separations. The invention accomplishes this by providing mixing zones for a plurality of fluids as well as heated and chilled feeds feeding the fluids to the mixing zones. Additionally, the system provides the ability to analyze separated components with a detector and/or collect separated fractions into vessels of a fraction collector for further separation and/or analysis.
    Type: Application
    Filed: September 2, 2005
    Publication date: March 16, 2006
    Applicant: Symyx Technologies, Inc.
    Inventors: Miroslav Petro, Gary Diamond, Thomas McWaid, Keith Hall, Li Song, Trevor Frank
  • Publication number: 20050262931
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: July 28, 2005
    Publication date: December 1, 2005
    Inventors: Thomas McWaid, Peter Panagas, Steven Eaton, Amin Samsavar, William Wheeler
  • Patent number: 6931917
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Grant
    Filed: December 5, 2003
    Date of Patent: August 23, 2005
    Assignee: KLA-Tencor Corporation
    Inventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
  • Publication number: 20040118193
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: December 5, 2003
    Publication date: June 24, 2004
    Inventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
  • Publication number: 20030089163
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: December 26, 2002
    Publication date: May 15, 2003
    Inventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
  • Patent number: 6520005
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Grant
    Filed: May 18, 1999
    Date of Patent: February 18, 2003
    Assignee: KLA-Tencor Corporation
    Inventors: Thomas McWaid, Peter Panagas, Steven G. Eaton, Amin Samsavar, William R. Wheeler
  • Publication number: 20020174714
    Abstract: A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage.
    Type: Application
    Filed: May 18, 1999
    Publication date: November 28, 2002
    Inventors: THOMAS MCWAID, PETER PANAGAS, STEVEN G. EATON, AMIN SAMSAVAR, WILLIAM R. WHEELER
  • Patent number: 5955661
    Abstract: An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.
    Type: Grant
    Filed: January 6, 1997
    Date of Patent: September 21, 1999
    Assignee: KLA-Tencor Corporation
    Inventors: Amin Samsavar, Michael Weber, Thomas McWaid, William P. Kuhn, Robert E. Parks
  • Patent number: 5852232
    Abstract: An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick response time, which allows it to be an effective proximity detector. Additionally, the acoustic sensor is not affected by the material of the sample's surface layer.
    Type: Grant
    Filed: January 2, 1997
    Date of Patent: December 22, 1998
    Assignee: Kla-Tencor Corporation
    Inventors: Amin Samsavar, Thomas McWaid, Sergey Yudin