Abstract: Piezoelectric devices with excellent high temperature operation capabilities are described, including piezoelectric sensors and actuators that use a rare earth calcium oxyborate or langanite as the piezoelectric material.

Abstract: Co-fired multilayer piezoelectric ceramic materials with base metal electrodes based on copper, copper alloy, are found as an effective approach to manufacture low cost multilayer piezoelectrics. The method of the invention is performed at low firing temperature and without the oxidation of base metal or reduction of ceramic components. A variety of ceramic materials may be used and copper is the preferred base metal in the multi-layer piezoelectric devices of the invention. This copper has additional protection against oxidation with a small inorganic coating on the surface. With such protection, the binder and other organics can also be efficiently removed and produce superior performance in the piezoelectric structured devices.

Abstract: There are provided methods and compositions for co-fired multilayer piezoelectric ceramic materials with base metal electrodes. The method of the invention is performed at low firing temperatures and without the oxidation of base metal or reduction of ceramic components. A variety of ceramic materials may be used and copper is the preferred base metal in the multi-layer piezoelectric devices of the invention.