Patents by Inventor Thomas U. Boettiger

Thomas U. Boettiger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of profiling edges and removing edge beads
    Patent number: 8826926
    Abstract: Some embodiments include methods for removing an edge bead after a photoresist application. Basic solution may be applied to the edge bead and removed with a vacuum, with the basic solution having a pH of at least about 14. Some embodiments include methods of profiling coatings along peripheral regions of substrates. A nozzle may be positioned above a peripheral region and oriented to direct a basic solution downwardly toward the peripheral region. A suction port may be positioned laterally outward of the peripheral region. Basic solution may be ejected from the nozzle toward the peripheral region, with the basic solution having a pH of at least about 14 and dissolving coating along the peripheral region. A vacuum may be provided within the suction port to pull the basic solution and the dissolved coating from the peripheral region.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: September 9, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Michael E. Chalom, Thomas U. Boettiger
  • Methods of Profiling Edges and Removing Edge Beads
    Publication number: 20120305030
    Abstract: Some embodiments include methods for removing an edge bead after a photoresist application. Basic solution may be applied to the edge bead and removed with a vacuum, with the basic solution having a pH of at least about 14. Some embodiments include methods of profiling coatings along peripheral regions of substrates. A nozzle may be positioned above a peripheral region and oriented to direct a basic solution downwardly toward the peripheral region. A suction port may be positioned laterally outward of the peripheral region. Basic solution may be ejected from the nozzle toward the peripheral region, with the basic solution having a pH of at least about 14 and dissolving coating along the peripheral region. A vacuum may be provided within the suction port to pull the basic solution and the dissolved coating from the peripheral region.
    Type: Application
    Filed: June 6, 2011
    Publication date: December 6, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Michael E. Chalom, Thomas U. Boettiger