Abstract: A method for determining a correction for an apparatus used in a process of patterning substrates, the method including: obtaining a group structure associated with a processing history and/or similarity in fingerprint of to be processed substrates; obtaining metrology data associated with a plurality of groups within the group structure, wherein the metrology data is correlated between the groups; and determining the correction for a group out of the plurality of groups by applying a model to the metrology data, the model including at least a group-specific correction component and a common correction component.

Abstract: A method for determining a correction for an apparatus used in a process of patterning substrates, the method including: obtaining a group structure associated with a processing history and/or similarity in fingerprint of to be processed substrates; obtaining metrology data associated with a plurality of groups within the group structure, wherein the metrology data is correlated between the groups; and determining the correction for a group out of the plurality of groups by applying a model to the metrology data, the model including at least a group-specific correction component and a common correction component.

Abstract: The parking brake of a vehicle is operated by a power-generating generating actuating unit 4. For maintaining the function of the parking brake in the event of a failure of the power operating device 1, an emergency operating device 2 is provided which can be operated by muscle force. Both operating devices 1, 2 have mechanical transmissions 5, 12 which act upon a common threaded spindle 3 for tensioning and releasing the parking brake. By way of the mutual self-locking design of the mechanical transmission 5, 12 which depends on the type of operation, it is achieved that both operating modes (power or muscle force) can be carried out in any sequence and without any limitation of the adjusting path(s).