Patents by Inventor Tien Ching Ting

Tien Ching Ting has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration device for nozzle and calibration method for nozzle
    Patent number: 7581331
    Abstract: A calibration device for a nozzle suitable for calibrating a nozzle of a semiconductor apparatus is provided. The semiconductor apparatus includes a chuck with a center hole with radius R1. A cap with outer radius R3 is disposed outside the nozzle with outer radius R2. The calibration device includes a jig including an upper portion, a lower portion and a recess in the front surface of the upper portion. The recess includes an outer portion with depth D1 and radius R4 larger than R3 and an inner portion with depth D2 larger than D1 and radius R5 larger than R2. The lower portion with a radius R6 less than R1 is connected to the back surface of the upper portion for fixing the jig in the center hole. The values of (R4?R3), (R5?R2) and (R1?R6) are in the tolerable calibration inaccuracy range.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: September 1, 2009
    Assignee: United Microelectronics Corp.
    Inventors: Wai Keong Alvin Wong, Tien Ching Ting, Yong-An Lin, Jin Seng Chan
  • CALIBRATION DEVICE FOR NOZZLE AND CALIBRATION METHOD FOR NOZZLE
    Publication number: 20090183380
    Abstract: A calibration device for a nozzle suitable for calibrating a nozzle of a semiconductor apparatus is provided. The semiconductor apparatus includes a chuck with a center hole with radius R1. A cap with outer radius R3 is disposed outside the nozzle with outer radius R2. The calibration device includes a jig including an upper portion, a lower portion and a recess in the front surface of the upper portion. The recess includes an outer portion with depth D1 and radius R4 larger than R3 and an inner portion with depth D2 larger than D1 and radius R5 larger than R2. The lower portion with a radius R6 less than R1 is connected to the back surface of the upper portion for fixing the jig in the center hole. The values of (R4?R3), (R5?R2) and (R1?R6) are in the tolerable calibration inaccuracy range.
    Type: Application
    Filed: January 22, 2008
    Publication date: July 23, 2009
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wai Keong Alvin Wong, Tien Ching Ting, Yong-An Lin, Jin Seng Chan