Patents by Inventor Till SCHARF

Till SCHARF has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Isolator for a stationary vibration isolation system
    Patent number: 10634210
    Abstract: An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: April 28, 2020
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Till Scharf
  • Pneumatic actuator and method for operating an active vibration isolation system
    Patent number: 10480609
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: November 19, 2019
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Frank Hofmann, Han Hartgers, Till Scharf
  • PNEUMATIC ACTUATOR AND METHOD FOR OPERATING AN ACTIVE VIBRATION ISOLATION SYSTEM
    Publication number: 20170370442
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 28, 2017
    Inventors: Arndt EVERS, Frank HOFMANN, Han HARTGERS, Till SCHARF
  • ISOLATOR FOR A STATIONARY VIBRATION ISOLATION SYSTEM
    Publication number: 20170370441
    Abstract: An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 28, 2017
    Inventors: Arndt EVERS, Till SCHARF